Profilm3D

The Filmetrics^® Profilm3D^® and Profilm3D-200 optical profilometers are affordable, non-contact, white light interferometry-based (WLI) 3D surface topography measurement systems. The Profilm3D series measures nanometer- to millimeter-scale surface features, producing high-resolution 3D surface data and TotalFocus^™ images (color 3D images with a depth-of-field equal to the vertical scan distance). With a simple, flexible recipe set up, accommodating single scans or automated measurements on multiple sites, the Profilm3D supports both R&D and production environments.

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Product Description

The Filmetrics Profilm3D and Profilm3D-200 white light interferometers generate high-resolution measurements of the surface topography with sub-nanometer-level resolution. The tools support both vertical scanning and phase shifting interferometry. Using TotalFocus technology, Profilm3D provides stunning 3D natural color images with every pixel in focus.

In the Profilm3D measurement technique, the vertical resolution of the measurement is independent of the numerical aperture of the objective, enabling high-resolution measurements with a large field of view. The measured area can be further increased by stitching multiple fields of view into a single measurement. The Profilm3D also features a simple, innovative user interface and automated features to support a broad range of working environments, from R&D to production.

Our Profilm^® software suite features cutting-edge cloud-based ProfilmOnline^® web services, Android and iOS mobile applications, and advanced Profilm desktop software to provide flexible data storage, visualization and analysis solutions.

Features

Vertical scanning and phase shifting interferometry for measurement of surface features from nanometers to millimeters
Automated X-Y stage with a long travel range, great for mapping and stitching scans
Automated focus with industry-leading long piezo travel range for scanning multiple surfaces separated by large height distances
Intuitive software suite including advanced Profilm desktop, the cloud-based ProfilmOnline and mobile applications for flexible data storage, visualization and analysis
TotalFocus imaging, resulting in stunning True Color images with every pixel in focus, even on surfaces with height variation larger than the objective’s depth-of-focus

Applications

Step height: 3D step height from nanometers to millimeters
Texture: 3D roughness and waviness
Form: 3D bow and shape
True Color: TotalFocus image of the 3D surface topography
Edge rolloff: 3D edge profile measurements
Defect review: 3D defect surface topography

Industries

Universities, research labs and institutes
Silicon and compound semiconductor
Precision optics and mechanics
Medical devices
LED: Light emitting diodes
Power devices
MEMS: Micro-electromechanical systems
Data storage
Automotive
And more: Contact us with your requirements

The options for the Profilm3D are available to add on with your new product, or in the future. Contact your sales rep to learn more.

Profilm3D Series

The Filmetrics Profilm3D white light interferometer features motorized X-Y and Z stages with 100mm travel and a manual tip/tilt stage. The system supports phase shifting and vertical scanning interferometry for high-resolution 3D surface topography measurements.

The Filmetrics Profilm3D-200 white light interferometer includes the same features as the Profilm3D but adds a larger motorized X-Y stage supporting 200mm by 200mm of travel.

Profilm Software Suite

The Filmetrics Profilm software package is comprehensive, intuitive, fast and user-friendly. 3D data operations and analysis functions such as leveling, filtering, step height, roughness, and surface topography analysis techniques are included in the basic configuration. Profilm supports ISO roughness calculation methods, plus local standards, such as ASME. Data from Profilm can be uploaded to the ProfilmOnline platform with a single click for easy, secure data storage and sharing.

ProfilmOnline Web Application

Filmetrics ProfilmOnline is a cloud-based 3D data visualization and analysis platform developed as part of the Profilm software suite. ProfilmOnline is the place to share, store, view and analyze 3D data, whether you’re on your computer or a mobile device. Apps for Android and iOS operating systems are available and a wide variety of file formats is supported. Data can be encrypted for security.

Objective Lenses

The four-position turret holds objective lenses with magnifications ranging from 5x to 100x, to support nano-, micro- and macro-topography applications. The 5x objective is a Michaelson interferometry objective. The 10x, 20x, 50x, and 100x objectives are Mirau interferometry objectives.

Stages

Motorized stages for the X-Y and Z axes are standard on the Profilm3D system. The X-Y stage has a travel of 100mm by 100mm for Profilm3D, and 200mm by 200mm for Profilm3D-200. The Z stage has a range of 100mm. The travel along all axes of motion is programmable. A manual tip and tilt stage are standard with ±5° of motion.

A manual R-theta wafer stage is also available on Profilm3D series optical profilometers, supporting 50mm- to 200mm-diameter wafers. In addition, the Profilm3D-200 supports an adapter for holding up to 200mm wafers.

Isolation Tables

The Filmetrics Profilm3D series offers Accurion Nano30 Series active tabletop vibration isolation systems, which use electro-dynamic drive active vibration isolation in all six degrees of freedom.

Step Height Standards

The Filmetrics Profilm3D series includes a custom-designed Cr on Si 10µm step height standard, consisting of an etched step with a chrome coating. A multi-step height standard is also available as an option, featuring 0.1µm, 2µm and 4µm steps.

Profilm3D

Profilm3D

Product Description

Features

Applications

Industries

Step Height

Texture: Roughness and Waviness

Form: Bow and Shape

TotalFocus

Profilm3D Series

Profilm Software Suite

ProfilmOnline Web Application

Objective Lenses

Stages

Isolation Tables

Step Height Standards

Zeta-20

Stylus Profilers

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