Timeline of Innovation

Our history of innovation and deep expertise have built a broad portfolio of measurement and inspection solutions that address every requirement and environment. See how it all started from the inception of the Alpha-Step® product line in 1977 through our latest product innovations.

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Defect Inspectors

The Candela® inspection systems for compound semiconductors and hard disk drives can help engineers achieve significant yield and process improvements, in applications spanning communications and networking, LEDs, power devices, sensing, solar, photovoltaics and data storage.

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The KLA Instruments nanoindenter portfolio provides precise, reliable and repeatable testing to characterize static and dynamic mechanical properties of materials, under a wide range of test conditions.

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Optical Profilers

The Profilm3D® and Zeta optical profilometers offer fast, non-contact solutions for 3D step height, roughness, and other surface topography measurements, leveraging interferometer and ZDot measurement techniques.

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Sheet Resistance Measurement

The Filmetrics® sheet resistance measurement systems provide information critical to manufacturing and performance for semiconductor, solar and LED devices, materials research, flat panel displays and flexible electronics.

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Stylus Profilers

The Alpha-Step®, Tencor P-series and HRP® stylus profilometers enable high-precision, 2D and 3D surface metrology. The stylus profilers measure step height, roughness, bow and stress with industry-leading stability and reliability for your R&D and production metrology requirements.

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Thin-Film Reflectometers

The Filmetrics thin-film reflectometers provide thickness and refractive index measurements of transparent films in seconds, with industry-leading precision.

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The KLA Instruments service group offers a global network of fast, responsive and flexible support options to accommodate your unique needs and maximize your uptime.

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Upcoming Events

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May 25, 2021 09:00 AM Pacific Time (US and Canada)

Resistance Measurements and Wearable Technology


Jul 13, 2021 10:00 AM Pacific Time (US and Canada)

Deep Trench Measurement with the Zeta 3D Optical Profiler

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Aug 10, 2021 10:00 AM Pacific Time (US and Canada)

So Many Metrology Techniques: Which One to Choose?


Sep 8, 2021 09:00 AM Pacific Time (US and Canada)

Theoretical Introduction to Nano-Scratch Testing and 3D Profilometry


Sep 14, 2021 10:00 AM Pacific Time (US and Canada)

Measurement of Soft Materials using Tencor Stylus Profilers


Oct 19, 2021 10:00 AM Pacific Time (US and Canada)

Through Glass Measurements of Surface Topography


Oct 20, 2021 09:00 AM Pacific Time (US and Canada)

Spot Size and Lateral Resolution of Sheet Resistance Measurements


Nov 9, 2021 10:00 AM Pacific Time (US and Canada)

Profilm3D for Multiple Interfaces



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