Timeline of Innovation

Our history of innovation and deep expertise have built a broad portfolio of measurement and inspection solutions that address every requirement and environment. See how it all started from the inception of the Alpha-Step® product line in 1977 through our latest product innovations.

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Thin-Film Reflectometers

The Filmetrics thin-film reflectometers provide thickness and refractive index measurements of transparent films in seconds, with industry-leading precision.

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Nanoindenters

The KLA Instruments nanoindenter portfolio provides precise, reliable and repeatable testing to characterize static and dynamic mechanical properties of materials, under a wide range of test conditions.

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Optical Profilers

The Profilm3D® and Zeta optical profilometers offer fast, non-contact solutions for 3D step height, roughness, and other surface topography measurements, leveraging interferometer and ZDot measurement techniques.

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Stylus Profilers

The Alpha-Step®, Tencor P-series and HRP® stylus profilometers enable high-precision, 2D and 3D surface metrology. The stylus profilers measure step height, roughness, bow and stress with industry-leading stability and reliability for your R&D and production metrology requirements.

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Defect Inspectors

The Candela® inspection systems for compound semiconductors and hard disk drives can help engineers achieve significant yield and process improvements, in applications spanning communications and networking, LEDs, power devices, sensing, solar, photovoltaics and data storage.

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Service

The KLA Instruments service group offers a global network of fast, responsive and flexible support options to accommodate your unique needs and maximize your uptime.

Upcoming Event

Indentation University - Session 17: High-speed Nanoindentation

With careful attention to instrumentation and software, nanoindentation experiments can be accomplished at a rate faster than one second per indent. High-speed indentation opens new doors for statistical analysis and mechanical-properties

Event Date August 12, 2020

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