Optical Profilometers

Optical Profilometers

Profilm3D®, MicroXAM and Zeta optical profilometers provide fast, easy, non-contact solutions for 3D surface topography measurements. Our portfolio of optical profilers supports a variety of measurement techniques, including white light interferometry, true color imaging and ZDot confocal grid structured illumination. We can help guide you to the right solution for your unique needs.

Timeline of Innovation

The history of the optical profiler portfolio of KLA Instruments™ is a story of innovation from diverse origins. ADE launched the MicroXAM interferometer. Zeta Instruments developed ZDot and multi-mode optical profilers. Filmetrics® introduced novel, general-purpose white-light interferometers. These products came together into a diverse portfolio of optical profilometers, now unified under the KLA Instruments brand. Learn more about our rich history of innovation and how our tools continue to evolve to support your surface metrology requirements.

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Profilm3D

The Profilm3D is an affordable, compact benchtop optical profiler utilizing white light interferometry for easy, non-contact measurement of 3D step heights, roughness, and other surface topography.

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MicroXAM-800

Leveraging phase and vertical scanning white-light interferometer technology, the MicroXAM-800 benchtop optical profilometer measures nanometer-level 3D surface topography.

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Zeta-20

The Zeta-20 benchtop optical profilometer features patented ZDot technology and flexible multi-mode optics for measurement of 3D surface topography, film thickness and automated defect inspection.

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Zeta-300

Building upon the proven performance of the Zeta-20, the Zeta-300 includes integrated vibration isolation and support for larger sample sizes to meet your R&D and production requirements.

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Zeta-388

The Zeta-388 combines the Zeta-300 system with a cassette-to-cassette wafer handler, pattern recognition, automated data analysis and SECS/GEM to support production measurement requirements.

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Defect Inspectors

The Candela® inspection systems for compound semiconductors and hard disk drives can help engineers achieve significant yield and process improvements, in applications spanning communications and networking, LEDs, power devices, sensing, solar, photovoltaics and data storage.

Nanoindenters

The KLA Instruments nanoindenter portfolio provides precise, reliable and repeatable testing to characterize static and dynamic mechanical properties of materials, under a wide range of test conditions.

Stylus Profilers

The Alpha-Step®, Tencor P-series and HRP® stylus profilometers enable high-precision, 2D and 3D surface metrology. The stylus profilers measure step height, roughness, bow and stress with industry-leading stability and reliability for your R&D and production metrology requirements.

Thin-Film Reflectometers

The Filmetrics thin-film reflectometers provide thickness and refractive index measurements of transparent films in seconds, with industry-leading precision.

 

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