Optical Profilometers

Optical Profilometers

Profilm3D®, MicroXAM and Zeta optical profilometers provide fast, easy, non-contact solutions for 3D surface topography measurements. Our portfolio of optical profilers supports a variety of measurement techniques, including white light interferometry, True Color imaging and ZDot confocal grid structured illumination. We can help guide you to the right profiler solution for your unique needs.

Timeline of Innovation

The history of the optical profiler portfolio of KLA Instruments™ is a story of innovation from diverse origins. ADE launched the MicroXAM interferometer. Zeta Instruments developed ZDot and multi-mode optical profilers. Filmetrics® introduced novel, general-purpose white-light interferometers. These products came together into a diverse portfolio of optical profilometers, now unified under the KLA Instruments brand. Learn more about our rich history of innovation and how our tools continue to evolve to support your surface metrology requirements.

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The Profilm3D is an affordable, compact benchtop optical profiler utilizing white light interferometry for easy, non-contact measurement of 3D step heights, roughness, and other surface topography.

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Leveraging phase and vertical scanning white-light interferometer technology, the MicroXAM-800 benchtop optical profilometer measures nanometer-level 3D surface topography.

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The Zeta-20 benchtop optical profilometer features patented ZDot technology and flexible multi-mode optics for measurement of 3D surface topography, film thickness and automated defect inspection.

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Building upon the proven performance of the Zeta-20, the Zeta-300 includes integrated vibration isolation and support for larger sample sizes to meet your R&D and production requirements.

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The Zeta-388 combines the Zeta-300 system with a cassette-to-cassette wafer handler, pattern recognition, automated data analysis and SECS/GEM to support production measurement requirements.

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Looking for stylus surface profilometers?

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Upcoming Events

May 11, 2021 10:00 AM Pacific Time (US and Canada)

Spectral Reflectance with the F40 Microscope


May 25, 2021 09:00 AM Pacific Time (US and Canada)

Resistance Measurements and Wearable Technology


Jul 13, 2021 10:00 AM Pacific Time (US and Canada)

Deep Trench Measurement with the Zeta 3D Optical Profiler

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Aug 10, 2021 10:00 AM Pacific Time (US and Canada)

So Many Metrology Techniques: Which One to Choose?


Sep 8, 2021 09:00 AM Pacific Time (US and Canada)

Theoretical Introduction to Nano-Scratch Testing and 3D Profilometry


Sep 14, 2021 10:00 AM Pacific Time (US and Canada)

Measurement of Soft Materials using Tencor Stylus Profilers


Oct 19, 2021 10:00 AM Pacific Time (US and Canada)

Through Glass Measurements of Surface Topography


Oct 20, 2021 09:00 AM Pacific Time (US and Canada)

Spot Size and Lateral Resolution of Sheet Resistance Measurements



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Sheet Resistance Measurement

The Filmetrics® sheet resistance measurement systems provide information critical to manufacturing and performance for semiconductor, solar and LED devices, materials research, flat panel displays and flexible electronics.

Stylus Profilers

The Alpha-Step®, Tencor P-series and HRP® stylus profilometers enable high-precision, 2D and 3D surface metrology. The stylus profilers measure step height, roughness, bow and stress with industry-leading stability and reliability for your R&D and production metrology requirements.

Thin-Film Reflectometers

The Filmetrics thin-film reflectometers provide thickness and refractive index measurements of transparent films in seconds, with industry-leading precision.


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