Optical Profilometers

Optical Profilometers

Profilm3D® and Zeta™️️ optical profilometers provide fast, easy, non-contact solutions for 3D surface topography measurements. Our portfolio of optical profilers supports a variety of measurement techniques, including white light interferometry, True Color imaging and ZDot confocal grid structured illumination. We can help guide you to the right profiler solution for your unique needs.


The Profilm3D is an affordable, compact benchtop optical profiler utilizing white light interferometry for easy, non-contact measurement of 3D step heights, roughness, and other surface topography.

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The Zeta-20 benchtop optical profilometer features patented ZDot technology and flexible multi-mode optics for measurement of 3D surface topography, film thickness and automated defect inspection.

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Building upon the proven performance of the Zeta-20, the Zeta-300 optical profiler includes integrated vibration isolation and support for larger sample sizes to meet your R&D and production requirements.

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The Zeta-388 optical profiler combines the Zeta-300 system with a cassette-to-cassette wafer handler, pattern recognition, automated data analysis and SECS/GEM to support production measurement requirements.

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Looking for stylus surface profilometers?

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Technical Literature

Browse application notes and technical papers from KLA Instruments Application Engineers and customers, covering a variety of use cases for KLA Instruments products.



Timeline of Innovation

The history of the optical profiler portfolio of KLA Instruments™ is a story of innovation from diverse origins. ADE launched the MicroXAM interferometer. Zeta Instruments developed ZDot and multi-mode optical profilers. Filmetrics® introduced novel, general-purpose white-light interferometers. These products came together into a diverse portfolio of optical profilometers, now unified under the KLA Instruments brand. Learn more about our rich history of innovation and how our tools continue to evolve to support your surface metrology requirements.

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Defect Inspectors

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Sheet Resistance Mappers

The Filmetrics® sheet resistance mapping instruments have been developed based on over 45 years of resistance measurement innovation and technical expertise.

Stylus Profilers

The Alpha-Step®, Tencor P-series and HRP® stylus profilometers enable high-precision, 2D and 3D surface metrology. The stylus profilers measure step height, roughness, bow and stress with industry-leading stability and reliability for your R&D and production metrology requirements.

Thin-Film Reflectometers

The Filmetrics thin-film reflectometers provide thickness and refractive index measurements of transparent films in seconds, with industry-leading precision.


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