Optical Profilometers
Optical Profilometers
Profilm3D®, MicroXAM and Zeta optical profilometers provide fast, easy, non-contact solutions for 3D surface topography measurements. Our portfolio of optical profilers supports a variety of measurement techniques, including white light interferometry, True Color imaging and ZDot™ confocal grid structured illumination. We can help guide you to the right profiler solution for your unique needs.
Timeline of Innovation
The history of the optical profiler portfolio of KLA Instruments™ is a story of innovation from diverse origins. ADE launched the MicroXAM interferometer. Zeta Instruments developed ZDot and multi-mode optical profilers. Filmetrics® introduced novel, general-purpose white-light interferometers. These products came together into a diverse portfolio of optical profilometers, now unified under the KLA Instruments brand. Learn more about our rich history of innovation and how our tools continue to evolve to support your surface metrology requirements.
Profilm3D
The Profilm3D is an affordable, compact benchtop optical profiler utilizing white light interferometry for easy, non-contact measurement of 3D step heights, roughness, and other surface topography.
MicroXAM-800
Leveraging phase and vertical scanning white-light interferometer technology, the MicroXAM-800 benchtop optical profilometer measures nanometer-level 3D surface topography.
Zeta-20
The Zeta-20 benchtop optical profilometer features patented ZDot technology and flexible multi-mode optics for measurement of 3D surface topography, film thickness and automated defect inspection.
Zeta-300
Building upon the proven performance of the Zeta-20, the Zeta-300 includes integrated vibration isolation and support for larger sample sizes to meet your R&D and production requirements.
Zeta-388
The Zeta-388 combines the Zeta-300 system with a cassette-to-cassette wafer handler, pattern recognition, automated data analysis and SECS/GEM to support production measurement requirements.
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