Optical Profilometers
Optical Profilometers
Profilm3D® and Zeta™️️ optical profilometers provide fast, easy, non-contact solutions for 3D surface topography measurements. Our portfolio of optical profilers supports a variety of measurement techniques, including white light interferometry, True Color imaging and ZDot™ confocal grid structured illumination. We can help guide you to the right profiler solution for your unique needs.
Profilm3D
The Profilm3D is an affordable, compact benchtop optical profiler utilizing white light interferometry for easy, non-contact measurement of 3D step heights, roughness, and other surface topography.
Zeta™-20
The Zeta-20 benchtop optical profilometer features patented ZDot technology and flexible multi-mode optics for measurement of 3D surface topography, film thickness and automated defect inspection.
Zeta™-300
Building upon the proven performance of the Zeta-20, the Zeta-300 optical profiler includes integrated vibration isolation and support for larger sample sizes to meet your R&D and production requirements.
Zeta™-388
The Zeta-388 optical profiler combines the Zeta-300 system with a cassette-to-cassette wafer handler, pattern recognition, automated data analysis and SECS/GEM to support production measurement requirements.
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View MoreTechnical Literature
Browse application notes and technical papers from KLA Instruments Application Engineers and customers, covering a variety of use cases for KLA Instruments products.
Timeline of Innovation
The history of the optical profiler portfolio of KLA Instruments™ is a story of innovation from diverse origins. ADE launched the MicroXAM interferometer. Zeta Instruments developed ZDot and multi-mode optical profilers. Filmetrics® introduced novel, general-purpose white-light interferometers. These products came together into a diverse portfolio of optical profilometers, now unified under the KLA Instruments brand. Learn more about our rich history of innovation and how our tools continue to evolve to support your surface metrology requirements.
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Instruments
For industry experts, academics and other innovators, KLA Instruments delivers trusted measurements, enabling the world’s breakthrough technologies.
Defect Inspectors
The Candela® inspection systems for compound semiconductors and hard disk drives can help engineers achieve significant yield and process improvements, in applications spanning communications and networking, LEDs, power devices, sensing, solar, photovoltaics and data storage.
Nanoindenters
The KLA Instruments nanoindenter portfolio provides precise, reliable and repeatable testing to characterize static and dynamic mechanical properties of materials, under a wide range of test conditions.
Sheet Resistance Mappers
The Filmetrics® sheet resistance mapping instruments have been developed based on over 45 years of resistance measurement innovation and technical expertise.
Stylus Profilers
The Alpha-Step®, Tencor™ P-series and HRP® stylus profilometers enable high-precision, 2D and 3D surface metrology. The stylus profilers measure step height, roughness, bow and stress with industry-leading stability and reliability for your R&D and production metrology requirements.
Thin-Film Reflectometers
The Filmetrics thin-film reflectometers provide thickness and refractive index measurements of transparent films in seconds, with industry-leading precision.