Tencor™ Stylus Profilometers

Tencor™ Stylus Profilometers

KLA Instruments™ Alpha-Step®, Tencor P- and HRP®-series stylus profilometers deliver high-precision, 2D and 3D surface metrology, measuring step height, surface roughness, bow and stress with industry-leading stability and reliability for your R&D and production requirements.

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Oct 19, 2021 10:00 AM Pacific Time (US and Canada)

Through Glass Measurements of Surface Topography

Oct 20, 2021 09:00 AM Pacific Time (US and Canada)

Spot Size and Lateral Resolution of Sheet Resistance Measurements

Nov 9, 2021 10:00 AM Pacific Time (US and Canada)

Profilm3D for Multiple Interfaces


Alpha-Step® D-600

The Alpha-Step D-600 stylus profiler adds a motorized X-Y stage to the Alpha-Step technology, enabling automated mapping of 2D and 3D step height and surface roughness measurements.

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Tencor™ P-7

The Tencor P-7 leverages the industry-leading topography sensor and ultra-flat scanning technology of the Tencor P-17 in a platform that offers the best price to performance for a benchtop stylus profiler.

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Tencor™ P-17 & Tencor™ P-17 OF

The industry-leading Tencor P-17 is the latest generation benchtop stylus profiler built on over 40 years of surface metrology experience, providing precise 2D and 3D step height and surface roughness measurements for R&D and production environments.

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Alpha-Step® D-500

The Alpha-Step D-500 is an affordable, easy-to-use benchtop stylus profiler with a manual X-Y stage for 2D step height and surface roughness measurements for both lab and production environments.

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Tencor™ P-170

The Tencor P-170 profilometer enables fully automated measurements for the compound semiconductor industry, supporting cassette-to-cassette wafer handling including silicon, sapphire, silicon carbide, gallium arsenide, glass and more.

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Built for high throughput and the reliability required in a production environment, the HRP-260 stylus profilometer combines high resolution, long scan capability and cassette-to-cassette wafer handling.

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Looking for optical surface profilometers?

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Technical Literature

Browse application notes and technical papers from KLA Instruments Application Engineers and customers, covering a variety of use cases for KLA Instruments products.



Timeline of Innovation

Since the launch of the Alpha-Step 100 stylus profilometer in 1977, our technical experts have continued to bring key innovations such as advanced topography sensors, ultra-flat scanning stages and fully automated measurement capability to market. Our tools continue to evolve, providing repeatable and accurate measurements for your surface metrology requirements. Learn more about the rich history of innovation of our stylus profilers.

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