Sheet Resistance Measurement

Sheet Resistance Measurement

The Filmetrics® sheet resistance measurement instruments can measure sheet conductivity and metal thickness for thin films deposited on various substrates, including semiconductor wafer substrates, glass substrates, plastic (flexible) substrates, PCB patterned features, solar cells, flat panel display layers and patterned features, metal foils and stacked films.

Timeline of Innovation

Our history of innovation and deep expertise have built a broad portfolio of measurement and inspection solutions that address every requirement and environment. See how it all started from the inception of the Alpha-Step® product line in 1977 through our latest product innovations.

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Filmetrics R50-4PP

The Filmetrics R50-4PP contact four-point probe system measures and maps sheet resistance, and is recommended for thin metal and ion implant layers. Typical applications include metal layer and substrate thickness, sheet resistance, sheet resistivity, sheet conductance, and sheet conductivity.

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Filmetrics R50-EC

The Filmetrics R50-EC system utilizes a non-contact eddy current probe to measure and map sheet resistance, and is recommended for thicker metal layers and soft or flexible surfaces. Typical applications include metal layer thickness, sheet resistance, sheet resistivity, sheet conductance, and sheet conductivity.

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Looking for sheet resistance measurement tools for semiconductor chip manufacturing?

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Upcoming Events

May 11, 2021 10:00 AM Pacific Time (US and Canada)

Spectral Reflectance with the F40 Microscope

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May 25, 2021 09:00 AM Pacific Time (US and Canada)

Resistance Measurements and Wearable Technology

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Jul 13, 2021 10:00 AM Pacific Time (US and Canada)

Deep Trench Measurement with the Zeta 3D Optical Profiler

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Aug 10, 2021 10:00 AM Pacific Time (US and Canada)

So Many Metrology Techniques: Which One to Choose?

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Sep 8, 2021 09:00 AM Pacific Time (US and Canada)

Theoretical Introduction to Nano-Scratch Testing and 3D Profilometry

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Sep 14, 2021 10:00 AM Pacific Time (US and Canada)

Measurement of Soft Materials using Tencor Stylus Profilers

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Oct 19, 2021 10:00 AM Pacific Time (US and Canada)

Through Glass Measurements of Surface Topography

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Oct 20, 2021 09:00 AM Pacific Time (US and Canada)

Spot Size and Lateral Resolution of Sheet Resistance Measurements

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