Sheet Resistance Measurement
Sheet Resistance Measurement
The Filmetrics® sheet resistance measurement instruments can measure sheet conductivity and metal thickness for thin films deposited on various substrates, including semiconductor wafer substrates, glass substrates, plastic (flexible) substrates, PCB patterned features, solar cells, flat panel display layers and patterned features, metal foils and stacked films.
Timeline of Innovation
Our history of innovation and deep expertise have built a broad portfolio of measurement and inspection solutions that address every requirement and environment. See how it all started from the inception of the Alpha-Step® product line in 1977 through our latest product innovations.
Filmetrics R50-4PP
The Filmetrics R50-4PP contact four-point probe system measures and maps sheet resistance, and is recommended for thin metal and ion implant layers. Typical applications include metal layer and substrate thickness, sheet resistance, sheet resistivity, sheet conductance, and sheet conductivity.
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Filmetrics R50-EC
The Filmetrics R50-EC system utilizes a non-contact eddy current probe to measure and map sheet resistance, and is recommended for thicker metal layers and soft or flexible surfaces. Typical applications include metal layer thickness, sheet resistance, sheet resistivity, sheet conductance, and sheet conductivity.
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