Sheet Resistance Mappers

Sheet Resistance Mappers

The Filmetrics® sheet resistance measurement instruments have been developed based on over 45 years of resistance measurement innovation. From the introduction of the ADE 6035 resistivity gauge in 1975 to technology developed by Tencor Instruments, Prometrix and Filmetrics, the R50 is a culmination of combined technical expertise to deliver the R-Series sheet resistance metrology tools.

Filmetrics R50-4PP

The Filmetrics R50-4PP contact four-point probe system maps metal layer thickness, sheet resistance, sheet resistivity, sheet conductance, and sheet conductivity. The 10-decade measurement capability and large Z range make the R50-4PP ideal for a wide variety of applications.

The Filmetrics R50-200-4PP is also available to accommodate larger sample sizes.

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Filmetrics R50-EC

The Filmetrics R50-EC non-contact eddy current system maps metal layer thickness, sheet resistance, sheet resistivity, sheet conductance, and sheet conductivity. The non-contact eddy current sheet resistance measurement is ideal for measuring resistance and film thickness on sensitive and/or flexible conductive surfaces.

The Filmetrics R50-200-EC is also available to accommodate larger sample sizes.

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Looking for sheet resistance measurement tools for semiconductor chip manufacturing?

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Thin-Film Reflectometers

The Filmetrics thin-film reflectometers provide thickness and refractive index measurements of transparent films in seconds, with industry-leading precision.

 

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