Defect Inspection Systems

Defect Inspection Systems

Candela® defect inspection systems detect and classify a wide range of critical defects on compound semiconductor substrates (GaN, GaAs, InP, sapphire, SiC, etc.) and hard disk drives, with high sensitivity at production throughputs.

Upcoming Events

View All

Oct 19, 2021 10:00 AM Pacific Time (US and Canada)

Through Glass Measurements of Surface Topography

Oct 20, 2021 09:00 AM Pacific Time (US and Canada)

Spot Size and Lateral Resolution of Sheet Resistance Measurements

Nov 9, 2021 10:00 AM Pacific Time (US and Canada)

Profilm3D for Multiple Interfaces

 

Candela 8420

Optical Surface Analyzer (OSA) for tool and process monitoring, through surface defect detection and classification of surface defects including particle, stains, scratches and macro epi defects for photonics, LED, communications and other compound semiconductor applications.

Learn more

Candela 8720

High sensitivity wafer inspection tool, integrating surface defect detection and photoluminescence metrology for GaN applications in HBLED, MicroLED, VCSELs, LiDAR, IoT, 5G and other high-end compound semiconductor applications.

Learn more

Candela 8520

High sensitivity, high throughput wafer inspection tool, with integrated surface scattering and photoluminescence technology for defect detection and classification of topographic and crystallographic defects on SiC and GaN based power devices.

Learn more

ZetaScan

Low cost, high throughput inspection tool designed for defect detection and classification of defects on square or round GaAs, glass and sapphire wafers for solar, PV and display applications.

Learn more

Candela® 6300 Series

Laser based inspection system for hard disk drive (HDD) substrates that measures full disk surface topography, micro-roughness and waviness, and inspects the wafer surface for defects. The automated model, Candela 6340, includes disk cassette-to-cassette handling.

Learn more

Candela® 7100 Series

Laser based inspection system for high sensitivity surface defect inspection of hard disk drive (HDD) substrates and media, featuring multiple optical paths for classification of submicron pits and particles. The automated model, Candela 7140, includes disk cassette-to-cassette handling.

Learn more

Looking for wafer defect inspection and review for semiconductor chip manufacturing?

View More

Technical Literature

Browse application notes and technical papers from KLA Instruments Application Engineers and customers, covering a variety of use cases for KLA Instruments products.

Explore

 

Timeline of Innovation

Since the launch of the Candela Optical Surface Analyzer (OSA) in 1997, our technical experts have continued to introduce key innovations in defect sensitivity and classification for the compound semiconductor and data storage markets. Our inspection technology provides performance improvements with each new product release, including our industry-first, award-winning ability to combine high-speed surface defect detection and photoluminescence metrology on a single platform. Learn more about the rich history of innovation of our Candela defect inspectors.

Learn More

Receive the latest KLA Instruments news, papers, events, and more

Instruments Form
Data Transfer *

Follow KLA Instruments

Follow KLA Instruments to engage with our experts and learn about our tool applications.

Learn how our products can help you.

Explore More Solutions

KLA Instruments Logo

Instruments

For industry experts, academics and other innovators, KLA Instruments delivers trusted measurements, enabling the world’s breakthrough technologies.

Nanoindenters

The KLA Instruments nanoindenter portfolio provides precise, reliable and repeatable testing to characterize static and dynamic mechanical properties of materials, under a wide range of test conditions.

Optical Profilers

The Profilm3D® and Zeta™️️ optical profilometers offer fast, non-contact solutions for 3D step height, roughness, and other surface topography measurements, leveraging interferometer and ZDot measurement techniques.

Sheet Resistance Mappers

The Filmetrics® sheet resistance mapping instruments have been developed based on over 45 years of resistance measurement innovation and technical expertise.

Stylus Profilers

The Alpha-Step®, Tencor P-series and HRP® stylus profilometers enable high-precision, 2D and 3D surface metrology. The stylus profilers measure step height, roughness, bow and stress with industry-leading stability and reliability for your R&D and production metrology requirements.

Thin-Film Reflectometers

The Filmetrics thin-film reflectometers provide thickness and refractive index measurements of transparent films in seconds, with industry-leading precision.

 

Are you sure?

You've selected to view this site translated by Google Translate.
KLA China has the same content with improved translations.

Would you like to visit KLA China instead?


您已选择查看由Google翻译翻译的此网站。
KLA中国的内容与英文网站相同并改进了翻译。

你想访问KLA中国吗?

If you are a current KLA Employee, please apply through the KLA Intranet on My Access.

Exit