Defect Inspection Systems
Defect Inspection Systems
Candela® defect inspection systems detect and classify a wide range of critical defects on compound semiconductor substrates (GaN, GaAs, InP, sapphire, SiC, etc.) and hard disk drives, with high sensitivity at production throughputs.
Timeline of Innovation
Since the launch of the Candela Optical Surface Analyzer (OSA) in 1997, our technical experts have continued to introduce key innovations in defect sensitivity and classification for the compound semiconductor and data storage markets. Our inspection technology provides performance improvements with each new product release, including our industry-first, award-winning ability to combine high-speed surface defect detection and photoluminescence metrology on a single platform. Learn more about the rich history of innovation of our Candela defect inspectors.
Candela 8420
Optical Surface Analyzer (OSA) for tool and process monitoring, through detection and classification of surface defects including particle, stains, scratches and macro epi defects for photonics, LED, communications and other compound semiconductor applications.
Download Brochure
Candela 8720
High sensitivity wafer inspection tool, integrating surface defect detection and photoluminescence metrology for GaN applications in HBLED, MicroLED, VCSELs, LiDAR, IoT, 5G and other high-end compound semiconductor applications.
Download Brochure
Candela 8520
High sensitivity, high throughput wafer inspection tool, with integrated surface scattering and photoluminescence technology for detection and classification of topographic and crystallographic defects on SiC and GaN based power devices.
Download Brochure
ZetaScan
Low cost, high throughput inspection tool designed for detection and classification of defects on square or round GaAs, glass and sapphire wafers for solar, PV and display applications.
Download Brochure
Candela 6320 and 6340
Laser based inspection system for hard disk drive (HDD) substrates that measures full disk surface topography, micro-roughness and waviness, and inspects the wafer surface for defects. The automated model, Candela 6340, includes disk cassette-to-cassette handling.
Download Brochure
Candela 7110 and 7140
Laser based inspection system for high sensitivity surface defect inspection of hard disk drive (HDD) substrates and media, featuring multiple optical paths for classification of submicron pits and particles. The automated model, Candela 7140, includes disk cassette-to-cassette handling.
Download BrochureLooking for wafer defect inspection and review for semiconductor chip manufacturing?
View MoreReceive the latest KLA Instruments news, papers, events, and more
Follow KLA Instruments
Follow KLA Instruments to engage with our experts and learn about our tool applications.
Learn how our products can help you.
Explore More Solutions
Instruments
For industry experts, academics and other innovators, KLA Instruments delivers trusted measurements, enabling the world’s breakthrough technologies.
Nanoindenters
The KLA Instruments nanoindenter portfolio provides precise, reliable and repeatable testing to characterize static and dynamic mechanical properties of materials, under a wide range of test conditions.
Optical Profilers
The Profilm3D® and Zeta optical profilometers offer fast, non-contact solutions for 3D step height, roughness, and other surface topography measurements, leveraging interferometer and ZDot™ measurement techniques.
Stylus Profilers
The Alpha-Step®, Tencor™ P-series and HRP® stylus profilometers enable high-precision, 2D and 3D surface metrology. The stylus profilers measure step height, roughness, bow and stress with industry-leading stability and reliability for your R&D and production metrology requirements.
Thin-Film Reflectometers
The Filmetrics thin-film reflectometers provide thickness and refractive index measurements of transparent films in seconds, with industry-leading precision.