Flexible and Customizable Contracts

We recognize that every environment is different. That’s why KLA Service contracts are flexible and customizable. We track a wide range of fab metrics and collaborate with you to balance productivity, performance and cost. You can pick the service options that are right for you without paying for things you don’t need.

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Machine close up

Service from the Source

KLA tools are incredibly complex. Why trust their upkeep to anyone but the original manufacturer? We offer certified parts and a team of highly trained service engineers that can’t be found anywhere else.

Preserve Your Investment

Technology evolves rapidly. We offer upgrades and enhancements to extend tool performance into the next generation. We help you preserve your investment by increasing the lifespan of your tools.

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Pivot to the Next Node

KLA takes your changing business needs seriously. When you’re ready to move to the next node, we can work with you to analyze your current inspection and metrology setup and help you optimize your toolset for footprint, capacity, performance and cost.

Certified & Relaunched KLA Tools

Interested in KLA tools for larger design rule processes?

Certified & Relaunched Products


We also offer world class equipment and applications training.

Learning & Knowledge Services

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KLA-Tencor is now KLA

We've updated our look to match who we are as a company —
innovators and optimists
pushing the bounds of technology every day.

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