SPIE Photonics West 2021

KLA is pleased to take part in the SPIE Photonics West Digital Forum. We invite you to visit our virtual booth to learn more about our technologies.

SPIE Photonics West is the premier laser, photonics, biomedical optics event. SPIE Photonics West covers a wide range of topics: biomedical optics, biophotonics, industrial lasers, optoelectronics, microfabrication, MOEMS-MEMS and displays.

Event Dates Saturday, March 6 – Thursday, March 11, 2021
Location Virtual


KLA will participate in the virtual TMS 2021 Annual Meeting & Exhibition. Please visit us at booth 520 to learn about our innovations in nanoindentation.

TMS2021 will connect minerals, metals and materials scientists and engineers who work in industry, academia and government positions around the world. The event will draw more than 4,000 scientists and engineers.

Event Dates Monday, March 15 – Thursday, March 18, 2021
Location Virtual

SEMICON China 2021

KLA is looking forward to exhibiting at SEMICON China. Please visit us at booth 5721 where our experts will be on hand to provide information about our SensArray® in situ process monitoring and control products.

SEMICON China connects you to the world’s fastest-growing and most dynamic microelectronics market. It is an international trade fair for semiconductor technology that takes place once a year in Shanghai. Since its establishment in 1988, it has developed into the largest and most comprehensive exhibition for the semiconductor industry in China.

Event Dates Wednesday, March 17 – Friday, March 19, 2021
Booth 5721
Location Shanghai New International Expo Centre SNEIC, Shanghai, China

ASMC 2021

KLA is once again a sponsor of the Advanced Semiconductor Manufacturing Conference. In addition to the sponsorship, KLA’s Graham Jensen will present “Missing Via Defect Capture Enhancement Using a Novel, High-Precision Array Segmentation Inspection Technique”, Defect Inspection and Reduction (D1). We will also have a co-authored technical presentation, "The Use of Cross-Section Haze Measurements to Monitor Laser Spike Anneal (LSA) Stage Alignment", Equipment Optimization (EO).

ASMC is the leading international technical conference for discussing solutions that improve the collective manufacturing expertise of the semiconductor industry. Solving the challenges presented by semiconductor manufacturing is a combined effort by device makers, equipment and materials suppliers, and academics. ASMC provides an unparalleled platform for semiconductor professionals to network and learn the latest in the practical application of advanced manufacturing strategies and methodologies.

Event Dates Monday, May 10 – Wednesday, May 12, 2021
Location Virtual

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