In this article, SPTS, A KLA Company, demonstrates how their Synapse ™ plasma system can provide significant advantages over Inductively Coupled Plasma (ICP) approaches when etching for Bulk Acoustic Wave (BAW) manufacturing.
SPTS’s Synapse™ for AlN/AlScN Etch for BAW Filters
Jul 20, 2020
Breakthrough e-Beam Defect Inspection System
Jul 20, 2020
Today KLA Corporation (NASDAQ: KLAC) announced the revolutionary eSL10™ e-beam patterned-wafer defect inspection system. The new system is designed to accelerate time-to-market for […]...
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