Rick Wallace
Chief Executive Officer and President

Rick Wallace serves as the chief executive officer and president of KLA-Tencor Corporation as well as a member of the company’s board of directors. He began as an applications engineer at KLA Instruments in 1988, and has held various general management positions throughout his 29-year tenure with the company. Earlier in his career, he held positions with Ultratech Stepper and Cypress Semiconductor.

Wallace currently serves on the boards of directors for NetApp, Inc., a data management solutions company and the Silicon Valley Leadership Group, an organization focused on issues, programs and campaigns that affect the economic health and quality of life in the Silicon Valley.

Wallace earned his Bachelor of Science degree in electrical engineering from the University of Michigan and his Master of Science degree in engineering management from Santa Clara University.

altBren Higgins
Chief Financial Officer

Bren Higgins has served as chief financial officer for KLA-Tencor since 2013. In this role, Higgins oversees and manages the company’s finance operations and control processes, corporate procurement, strategic marketing, business development and investor relations.

Higgins began his tenure at KLA-Tencor in 1999 and held a variety of financial roles across the company. These roles include multiple division controller assignments; group controller for KLA-Tencor’s largest business group; senior director of financial planning and analysis; and vice president of corporate finance, where he had responsibility for treasury and investor relations and supported corporate business development activities.

Higgins earned his bachelor’s degree from the University of California at Santa Barbara and his master’s degree in finance from the University of California at Davis.


alt Ben Tsai, Ph.D.
Chief Technology Officer and Executive Vice President of Corporate Alliances

Ben Tsai, Ph.D., is the chief technology officer (CTO) and executive vice president of corporate alliances at KLA-Tencor. He is responsible for spearheading KLA-Tencor’s technology roadmap, strategic technology sourcing, corporate alliances and venture investments.

Tsai has spent more than 20 years at KLA-Tencor in various technology and business leadership positions. During his tenure at the company he has served as vice president and general manager of the WIN division and in 1994 was appointed to CTO when the company was operating as KLA Instruments. He was previously senior vice president of technology at Tokyo Electron Limited.

Tsai has held advisory roles with Ultratech, Inc., and Varian Semiconductor Associates, where he served on each company’s board of directors. Additionally, he holds approximately 50 patents in the areas of inspection and metrology.

Tsai received his bachelor’s degree in electrical engineering from the National Taiwan University, and his master’s degree and doctorate in electrical engineering from the University of Illinois at Urbana-Champaign.