ICPT is an annual conference covering all aspects of chemical-mechanical polishing. The conference will provide an international forum for academic researchers, industrial practitioners and engineers from around the world for the exchange of information on state-of-the-art research in CMP technology.

KLA-Tencor’s Andrew Cross will present a coauthored paper with imec, “On-Product Metrology at High Resolution Over Full Wafer — Applications for CMP & Fin Process Development” during the conference.
Event Dates Sunday, October 14, 2018
Monday, October 15, 2018
Tuesday, October 16, 2018
Wednesday, October 17, 2018
Location The K Hotel, Seoul, South Korea