Surface Profilers

Surface Profilers

Our stylus and optical profilers offer a complete range of surface metrology capabilities to meet the needs of the engineering and research communities. The profilers take measurement to the next level, starting with step height, texture and stress analysis.

(408) 875-0692 Let's Talk

Alpha-Step® D-500 Stylus Profiler

Product image of the AlphaStep D-500

Alpha-Step® D-500 Stylus Profiler

The Alpha-Step D-500 stylus profiler is capable of measuring 2D step heights from a few nanometers to 1200µm. It also supports 2D measurements of roughness, bow and stress for R&D and production environments.

Product Details

Alpha-Step® D-600 Stylus Profiler

Alpha-Step D-600 Stylus Profiler product image

Alpha-Step® D-600 Stylus Profiler

The Alpha-Step D-600 stylus profiler is capable of measuring 2D and 3D step heights from a few nanometers to 1200µm. It also supports 2D and 3D measurements of roughness, plus 2D bow and stress for R&D and production environments.

Product Details

P-7 Stylus Profiler

Product image showing the P-7 Stylus Profiler

P-7 Stylus Profiler

The P-7 builds on the success of the market leading P-17 benchtop stylus profiling system. It includes the superior measurement performance of the P-17 technology in a platform that offers a great price-to-features ratio for a benchtop stylus profiler. The P-7 offers step height measurement capability for steps from a few nanometers to one millimeter, for production and R&D environments.

Product Details

P-17 Stylus Profiler

Product picture of the P-17 Stylus Profiler

P-17 Stylus Profiler

The P-17 is an industry leading benchtop stylus profiler, built on over 40 years of surface metrology experience. The P-17 is capable of measuring step height from a few nanometers to one millimeter, for production and R&D environments.

Product Details

P-170 Stylus Profiler

Product image of the P-170 Surface Profiler

P-170 Stylus Profiler

The P-170 is a cassette-to-cassette stylus profiler combining the P-17's industry leading benchtop system measurement performance with the HRP®-260's production proven handler. This combination offers a great price-to-performance ratio for a handler-based system serving the semiconductor, compound semiconductor and related industries.

Product Details

HRP®-260 Stylus Profiler

Product image of the HRP-260

HRP®-260 Stylus Profiler

The HRP®-260 is a high-resolution, cassette-to-cassette stylus profiler. The HRP offers production proven performance with automated wafer handling capability serving the semiconductor, compound semiconductor, high brightness LED, data storage and related industries.

Product Details

MicroXAM-800 Optical Profiler

MicroXAM-800 product image

MicroXAM-800 Optical Profiler

The MicroXAM-800 optical profiler is a non-contact, 3D surface topography measurement system. The MicroXAM’s white light interferometer supports phase and vertical scanning interferometry to measure features from nanometers to millimeters.

Product Details

Zeta-20 Optical Profiler

Product image of the Zeta-20

Zeta-20 Optical Profiler

The Zeta-20 benchtop optical profiler is a non-contact, 3D surface topography measurement system. The system is powered by patented ZDot technology and Multi-Mode optics, enabling measurement of a variety of samples: transparent and opaque, low to high reflectance, smooth to rough texture, and step heights from nanometers to millimeters.

Product Details

Zeta-300 Optical Profiler

Product image of the Zeta-300

Zeta-300 Optical Profiler

The Zeta-300 optical profiler is a non-contact, 3D surface topography measurement system. The system incorporates integrated isolation options and configuration flexibility to handle larger samples. The Zeta-300 is powered by patented ZDot technology and Multi-Mode optics, enabling measurement of a variety of samples: transparent and opaque, low to high reflectance, smooth to rough texture, and step heights from nanometers to millimeters.

Product Details

Zeta-388 Optical Profiler

Product image of the Zeta-388

Zeta-388 Optical Profiler

The Zeta-388 optical profiler is a non-contact, 3D surface topography measurement system. The system incorporates integrated isolation options and includes a cassette-to-cassette handler for fully automated measurements. The Zeta-388 is powered by patented ZDot technology and Multi-Mode optics, enabling measurement of a variety of samples: transparent and opaque, low to high reflectance, smooth to rough texture, and step heights from nanometer to millimeters.

Product Details

Ready to get started?

Contact Us

Are you sure?

You've selected to view this site translated by Google Translate.
KLA China has the same content with improved translations.

Would you like to visit KLA China instead?


您已选择查看由Google翻译翻译的此网站。
KLA中国的内容与英文网站相同并改进了翻译。

你想访问KLA中国吗?

If you are a current KLA Employee, please apply through the KLA Intranet on My Access.

Exit