iNano^®

iNano^®

The iNano^® nanoindenter makes measuring thin films, coatings and small volumes of material easy. The accurate, flexible, user-friendly instrument can perform a wide range of nanoscale mechanical tests including indentation, hardness, scratch and universal nanoscale testing. The large dynamic range of force and displacement measurements allow materials from soft polymers to metals to be tested with accuracy and repeatability. Modular options can accommodate a variety of applications: material property maps, frequency-specific testing, scratch and wear testing and high-temperature testing. The iNano has a complete suite of options to expand testing, including sample heating, continuous stiffness measurement, NanoBlitz3D/4D property mapping and the remote video option.

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Product Description

The iNano features the InForce 50 actuator for performing nanoindentation and universal nanomechanical tests. The 50mN force and 50µm displacement range of the InForce 50 allow the system to perform a wide range of tests. The InView software is a flexible, modern software package that makes nanoscale testing easy. The iNano is a compact platform with the high-speed InQuest controller and vibration isolation gantry built in to the enclosure. An extensive range of materials and devices can be tested, including metals, ceramics, composites, thin films, coatings, polymers, biomaterials and gels.

Features

InForce 50 actuator for capacitance displacement measurement and electromagnetic force actuation with interchangeable tips
Unique software-integrated tip-calibration system for fast, accurate tip calibration
InQuest high-speed controller electronics with 100kHz data acquisition rate and 20µs time constant
XY motion system with easy mounting magnetic sample holder
Integrated microscope with digital zoom for precise indentation targeting
ISO 14577 and standardized test methods
InView software package with RunTest, ReviewData, InFocus reporting, InView University online training and InView mobile application

Applications

Hardness and modulus measurements (Oliver-Pharr)
High speed material property maps
ISO 14577 hardness testing
Polymer tan delta, storage and loss modulus
High Temperature Nanoindentation Testing

Industries

Universities, research labs and institutes
Semiconductor and packaging industry
Polymers and plastics
MEMS: Micro-electro-mechanical systems/nanoscale universal testing
Ceramics and glass
Metals and alloys
Pharmaceuticals
Coatings and paints
Polymer manufacturing
Composites
Batteries and energy storage

Hardness and Modulus Measurements (Oliver-Pharr)

Mechanical characterization is critical in the process and manufacture of films, including the quality of coatings in the automotive industry, as well as during process control of front-end and back-end semiconductor manufacturing.

The iNano nanoindenter is capable of measuring hardness and modulus for a wide variety of materials, from ultra-soft gels to hard coatings. The high speed assessment of these properties enables quality control and assurance on production lines.

High Speed Material Property Maps

For many materials, including composites, the mechanical properties may vary widely from one area to the next. The iNano provides a sample stage movement of 100mm in the X and Y axes, and 25mm in the Z axis, allowing testing of a wide range of sample heights over a large sample area. The optional NanoBlitz Topography and Tomography software can quickly generate color maps of any of the measured mechanical properties.

ISO 14577 Hardness Testing

The iNano nanoindenter includes a pre-written ISO 14577 Test Method that measures material hardness in compliance with the ISO 14577 standard. This test method automatically measures and reports Young’s modulus, instrumented hardness, Vickers hardness and the normalized work-of-indentation.

Polymer Tan Delta, Storage and Loss Modulus

The iNano nanoindenter is capable of measuring both tan delta and the storage and loss modulus for ultra-soft materials, including viscoelastic polymers. Storage and loss modulus and tan delta are important properties of viscoelastic polymers, whose energy is stored as elastic energy and dissipated as heat. Both of these metrics measure energy dissipation in a given material.

High Temperature Nanoindentation Testing

Nanoindentation at elevated temperatures is critical to characterizing material performance under thermal stress, especially for quantifying failure mechanisms during thermomechanical processing. Varying the sample temperature during mechanical testing enables not only measurement of thermal-induced behavioral changes, but also quantification of the transition plasticity of materials that are not easily tested on the nano-scale.

The options for the iNano are available to add on with your new product, or in the future. Contact your sales rep to learn more.

Continuous Stiffness Measurement (CSM)

Continuous stiffness measurement is used to quantify dynamic material properties, such as strain rate and frequency-induced effects. The CSM technique involves oscillating the probe during indentation to measure properties as a function of depth, force, time, or frequency. The option comes with a constant strain rate experiment that measures hardness and modulus as a function of depth or load, which is the most common test method used across academia and industry. CSM is also used for other advanced measurement options, including the ProbeDMA™ method for storage and loss modulus measurements and AccuFilm™ substrate-independent measurements. The CSM is integrated into the InQuest controller and InView software to deliver ease of use and data quality.

300°C Sample Heating

The 300°C sample heating option allows the sample to be placed into a chamber for uniform heating while simultaneously undergoing tests with the InForce 50 actuator. The option includes high-precision temperature control, inert gas backfill to reduce oxidation, and cooling to remove waste heat. ProbeDMA, AccuFilm, NanoBlitz and CSM are all compatible with the sample heating option.

NanoBlitz 3D

NanoBlitz 3D utilizes the InForce 50 actuator and a Berkovich tip to generate 3D maps of nanomechanical properties for high-E (> 3GPa) materials. NanoBlitz performs up to 100,000 indents (300x300 array) at < 1s per indent, and provides Young’s modulus (E), hardness (H), and stiffness (S) values at a specified load for each indent in the array. The large number of tests enables increased statistical accuracy. Histogram charts show multiple phases or materials. The NanoBlitz 3D package includes visualization and data handling capabilities.

NanoBlitz 4D

NanoBlitz 4D utilizes the InForce 50 actuator and a Berkovich tip to generate 4D maps of nanomechanical properties for both low-E/H and high-E (>3GPa) materials. NanoBlitz performs up to 10,000 indents (30x30 array) at 5-10s per indent, and provides Young’s modulus (E), hardness (H), and stiffness (S) values as a function of depth for each indent in the array. NanoBlitz 4D utilizes a constant strain rate method. The package includes visualization and data handling capabilities.

AccuFilm™ Thin Film Method Pack

The AccuFilm Thin Film Method Pack is an InView test method based on the Hay-Crawford model for measuring substrate-independent material properties using Continuous Stiffness Measurement (CSM). AccuFilm corrects for substrate influence on film measurements for hard films on soft substrates, as well as for soft films on hard substrates.

ProbeDMA™ Polymer Method Pack

The Polymer Pack provides the ability to measure the complex modulus of polymers as a function of frequency. The pack includes a flat-punch tip, a viscoelastic reference material, and a test method for evaluation of viscoelastic properties. This measurement technique is key to characterizing nanoscale polymers and polymer films that are not well-served by traditional dynamic mechanical analysis (DMA) test instruments.

Biomaterials Method Pack

The Biomaterials Method Pack provides the ability to measure the complex modulus of biomaterials with shear moduli on the order of 1kPa, and utilizes Continuous Stiffness Measurement (CSM). The pack includes a flat-punch tip and a test method for evaluation of viscoelastic properties. This measurement technique is key to characterizing small scale biomaterials that are not well-served by traditional rheometer instruments.

Scratch and Wear Testing Method Pack

Scratch testing involves the application of either a constant or ramped load to an indenter while moving across the sample surface at a specified velocity. Scratch testing allows characterization of numerous materials such as thin films, brittle ceramics and polymers.

DataBurst

DataBurst enables systems equipped with InView software and the InQuest controller to record displacement data at rates > 1kHz for measuring high strain step loads, pop-in and other high speed events. iNano systems outfitted with the User Method Development option can also modify methods to work with DataBurst.

User Method Development for InView Control Software

InView is a powerful, intuitive experiment-scripting platform that can be used for designing novel or complex experiments. Experienced users can set up and perform virtually any small-scale mechanical test using the iNano system equipped with the exclusive InView option.

Active Vibration Isolation with Modular Rack System

The optional high-performance active vibration isolation system provides additional vibration isolation for the iNano nanoindenter, on top of its built-in vibration isolation. This easy-to-install system provides vibration reduction in all six degrees of freedom, with no tuning required. A Modular Rack System houses all components conveniently within an integrated rack.

True Test I-V Electrical Measurements

Controlled through the InView software, the True Test I-V option for the iNano nanoindenter is and utilizes a precision ammeter and voltage source, a through-tip electrical path, and a conductive tip. This design allows the user to apply specific voltages to a sample and measure the current at the tip while simultaneously operating the InForce 50 actuator.

Indenter Tips and Calibration Samples

The InForce 50 and Gemini actuators utilize interchangeable tips. A wide variety of sharp indenters are available, such as Berkovich, cube corner and Vickers, as well as flat punches, sphere punches, and other geometries. Standard reference materials and calibration standards are also available for the entire product line.

Remote Video option

The Remote Video Option provides two more viewing angles within the iNano chamber, in addition to the existing microscope objective. One bracket is mounted for focusing on the indenter tip during the test, an ideal setup for flexures and soft materials. The second bracket mounts on the gantry for viewing both the sample and the microscope objective during test setup. Switching the view between the standard microscope objective and the USB camera is software-controlled.

Semiconductor Wafers

Semiconductor manufacturers often strive to produce the thin films with high mechanical integrity. KLA nanoindenters are capable of measuring elastic modulus and hardness of the thinnest films, without artifacts from the underlying substrate. Correlating real material changes to process parameters is critical for semiconductor applications.

Semiconductor Packaging

The performance and lifetime of an electronic component can depend upon the integrity of its packaging. KLA nanoindenters allow semiconductor packaging manufacturers to assess the mechanical properties of polymer underfills, solder strain-rate sensitivity, and the strength of metallic components.

Polymers and Plastics

Polymers and plastics are used in many applications due to their time-dependent deformation properties. Whether used as vibration dampers, extrusion materials, or medical implants, polymers are often analyzed via dynamic mechanical analysis (DMA). In many cases, the geometries of plastic components are not suitable for traditional DMA instruments. KLA nanoindenters are able to locally target areas on a plastic component and examine frequency-dependent storage and loss moduli and loss factors regardless of the geometry of the sample. Viscoelastic creep and stress relaxation properties can also be measured with the iNano.

Ceramics and Glasses

Ceramics and glasses are important materials used in many applications for their unique optical, mechanical, and electrical properties. Traditional mechanical testing of ceramics and glasses (e.g., 4-point bending) can be time-consuming and expensive. The iNano allows for rapid characterization of elastic modulus and hardness of small volumes of material. The scratch testing capability of nanoindenters is also well-suited to quantitatively assess the scratch resistance of optical coatings.

Metals and Alloys

Metals and alloys play an important role in many industries, such as automotive, aerospace, medical, and semiconductor. Traditional mechanical testing of metals and alloys (e.g., tensile testing) can be time-consuming and expensive. The iNano allows for rapid characterization of small volumes of material. It also allows users to characterize elastic modulus, hardness, and creep resistance, as well as gradients in these properties as a function of spatial location.

Batteries and Energy Storage

Mechanical properties of battery materials are closely tied to the battery’s stability, charge capacity, and lifetime. The iNano nanoindenter is well-suited for testing a wide range of battery materials, from soft lithium to hard ceramic substrates. The iNano provides advanced measurement solutions in many environments, including dry rooms and glove boxes.

Pharmaceutical, Food and Personal Care

The mechanical properties of pharmaceuticals, food, and personal care products are strongly linked to customer satisfaction and experience. The elastic modulus or stiffness of a material can be related to texture and feel. The mechanical properties of coatings are also critical to on-time drug delivery. The iNano nanoindenter provides quantitative information that supplements qualitative customer feedback.

Nanoscale Universal Testing

The iNano nanoindenter systems are capable of measuring nanoscale mechanical deformation and other nanomechanical properties. Measurement of nanoindentation, compression, tension, creep, stress relaxation, and fatigue are examples of the iNano’s versatile capabilities. Standard and custom experimental methods are supported. The dedicated scientists in the nanoindenter group at KLA are also available for consulting and experiment design.

iNano^®

iNano^®

Product Description

Features

Applications

Industries

Hardness and Modulus Measurements (Oliver-Pharr)

High Speed Material Property Maps

ISO 14577 Hardness Testing

Polymer Tan Delta, Storage and Loss Modulus

High Temperature Nanoindentation Testing

Continuous Stiffness Measurement (CSM)

300°C Sample Heating

NanoBlitz 3D

NanoBlitz 4D

AccuFilm™ Thin Film Method Pack

ProbeDMA™ Polymer Method Pack

Biomaterials Method Pack

Scratch and Wear Testing Method Pack

DataBurst

User Method Development for InView Control Software

Active Vibration Isolation with Modular Rack System

True Test I-V Electrical Measurements

Indenter Tips and Calibration Samples

Remote Video option

Semiconductor Wafers

Semiconductor Packaging

Polymers and Plastics

Ceramics and Glasses

Metals and Alloys

Batteries and Energy Storage

Pharmaceutical, Food and Personal Care

Nanoscale Universal Testing

iMicro

Nano Indenter^® G200

Stylus and Optical Profilers

KLA-Tencor is now KLA

Are you sure?

iNano®

iNano®

Product Description

Features

Applications

Industries

Hardness and Modulus Measurements (Oliver-Pharr)

High Speed Material Property Maps

ISO 14577 Hardness Testing

Polymer Tan Delta, Storage and Loss Modulus

High Temperature Nanoindentation Testing

Continuous Stiffness Measurement (CSM)

300°C Sample Heating

NanoBlitz 3D

NanoBlitz 4D

AccuFilm™ Thin Film Method Pack

ProbeDMA™ Polymer Method Pack

Biomaterials Method Pack

Scratch and Wear Testing Method Pack

DataBurst

User Method Development for InView Control Software

Active Vibration Isolation with Modular Rack System

True Test I-V Electrical Measurements

Indenter Tips and Calibration Samples

Remote Video option

Semiconductor Wafers

Semiconductor Packaging

Polymers and Plastics

Ceramics and Glasses

Metals and Alloys

Batteries and Energy Storage

Pharmaceutical, Food and Personal Care

Nanoscale Universal Testing

iMicro

Nano Indenter® G200

Stylus and Optical Profilers

KLA-Tencor is now KLA

Are you sure?

iNano^®

iNano^®

Nano Indenter^® G200