iMicro

iMicro

The iMicro nanoindenter makes measuring hard coatings, thin films, and small volumes of material easy. The accurate, flexible, user-friendly instrument can perform a wide range of nanoscale mechanical tests including indentation, hardness, scratch and universal nanoscale testing. Interchangeable actuators provide a large dynamic range of force and displacement, allowing researchers to test materials from soft polymers to hard metals and ceramics with accuracy and repeatability. Modular options can accommodate a variety of applications: material property maps, frequency-specific testing, scratch and wear testing, and high-temperature testing. The iMicro has a complete suite of options to expand testing, including sample heating, continuous stiffness measurement, NanoBlitz3D/4D property mapping and the Gemini 2D force transducer, which enables tribology and other two-axis measurements.

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Product Description

The iMicro features the InForce 1000 actuator for performing nanoindentation and universal nanomechanical tests, and can optionally add the InForce 50 actuator to test softer materials. The InView software is a flexible, modern software package that makes nanoscale testing easy. The iMicro is a compact platform with the high-speed InQuest controller and vibration isolation gantry built in to the enclosure. An extensive range of materials and devices can be tested, including metals, ceramics, composites, thin films, coatings, polymers, biomaterials and gels.

Features

InForce 1000 actuator for capacitance displacement measurement and electromagnetic force actuation with interchangeable tips
Optional InForce 50 actuator provide maximum 50mN normal force for measuring soft materials, and optional Gemini 2D force transducer for two-axis dynamic measurement. Unique software-integrated tip-calibration system for fast, accurate tip calibration
InQuest high-speed controller electronics with 100kHz data acquisition rate and 20µs time constant
XY motion system with easy mounting magnetic sample holder
High stiffness gantry with integrated vibration isolation
Integrated microscope with digital zoom for precise indentation targeting
ISO 14577 and standardized test methods
InView software package with RunTest, ReviewData, InFocus reporting, InView University online training and InView mobile application

Applications

Hardness and modulus measurements (Oliver-Pharr)
High speed material property maps
ISO 14577 hardness testing
Polymer tan delta, storage and loss modulus
Quantitative scratch and wear testing
High Temperature Nanoindentation Testing

Industries

Universities, research labs and institutes
Semiconductor industry
PVD/CVD hard coatings (DLC, TiN)
MEMS: Micro-electro-mechanical systems/nanoscale universal testing
Ceramics and glass
Metals and alloys
Pharmaceuticals
Coatings and paints
Composites
Batteries and energy storage
Automotive and aerospace

Hardness and Modulus Measurements (Oliver-Pharr)

Mechanical characterization is critical in the process and manufacture of films, including the quality of coatings in the automotive industry, as well as during process control of front-end and back-end semiconductor manufacturing.

The iMicro nanoindenter is capable of measuring hardness and modulus for a wide variety of materials, from ultra-soft gels to hard coatings. The high speed assessment of these properties enables quality control and assurance on production lines.

High Speed Material Property Maps

For many materials, including composites, the mechanical properties may vary widely from one area to the next. The iMicro provides a sample stage movement of 100mm in the X and Y axes, and 25mm in the Z axis, allowing testing of a wide range of sample heights over a large sample area. The optional NanoBlitz Topography and Tomography software can quickly generate color maps of any of the measured mechanical properties.

ISO 14577 Hardness Testing

The iMicro nanoindenter includes a pre-written ISO 14577 Test Method that measures material hardness in compliance with the ISO 14577 standard. This test method automatically measures and reports Young’s modulus, instrumented hardness, Vickers hardness and the normalized work-of-indentation.

Complex Shear Modulus of Compliant
Biomaterials

Polymer Tan Delta, Storage and Loss Modulus

The iMicro nanoindenter is capable of measuring both tan delta and the storage and loss modulus for ultra-soft materials, including viscoelastic polymers. Storage and loss modulus and tan delta are important properties of viscoelastic polymers, whose energy is stored as elastic energy and dissipated as heat. Both of these metrics measure energy dissipation in a given material.

Quantitative Scratch and Wear Testing

The iMicro can perform scratch and wear testing on a variety of materials. Coatings and films are subjected to many processes that test the strength of these films and their adhesion to the substrate, such as chemical-mechanical polishing (CMP) and wire bonding. It is important for these materials to resist plastic deformation during these processes, and to remain intact without blistering up from the substrate. Ideally, a dielectric material will have a high hardness and elastic modulus because these parameters help define how the material will react when subjected to manufacturing processes.

High Temperature Nanoindentation Testing

Nanoindentation at elevated temperatures is critical to characterizing material performance under thermal stress, especially for quantifying failure mechanisms during thermomechanical processing. Varying the sample temperature during mechanical testing enables not only measurement of thermal-induced behavioral changes, but also quantification of transition plasticity of materials that are not easily tested on the nano-scale.

The options for the iMicro are available to add on with your new product, or in the future. Contact your sales rep to learn more.

Continuous Stiffness Measurement (CSM)

Continuous stiffness measurement is used to quantify dynamic material properties, such as strain rate and frequency-induced effects. The CSM technique involves oscillating the probe during indentation to measure properties as a function of depth, force, time, or frequency. The option comes with a constant strain rate experiment that measures hardness and modulus as a function of depth or load, which is the most common test method used across academia and industry. CSM is also used for other advanced measurement options, including the ProbeDMA™ method for storage and loss modulus measurements and AccuFilm™ substrate-independent measurements. The CSM is integrated into the InQuest controller and InView software to deliver ease of use and data quality.

InForce 50 Actuator

The InForce 50 actuator performs nanomechanical tests with forces up to 50mN. The patented electromagnetic force application ensures robust measurements and long-term force and displacement stability. Industry-leading mechanical design ensures that harmonic motion is constrained to one degree of freedom so that force and displacement are controlled along a single axis. The InForce 50 actuator is compatible with the CSM, NanoBlitz, ProbeDMA, biomaterials, sample heating, scratch, wear and ISO 14577 testing options. Tips are interchangeable among the entire line of InForce and Gemini actuators.

Gemini Two-axis Actuator

Gemini two-axis technology brings standard indentation performance to a second lateral axis, with the CSM operating along both axes simultaneously. The additional information provided by this patented technique helps give new insight to material properties and failure mechanisms. The two-dimensional transducer is needed for lateral force and tribology measurements, and enables measurements of Poisson's ratio, coefficient of friction, scratch, wear, shear and topology.

300°C Sample Heating

The 300°C sample heating option allows the sample to be placed into a chamber for uniform heating while simultaneously undergoing tests with either the InForce 1000 or InForce 50 actuators. The option includes high-precision temperature control, inert gas backfill to reduce oxidation, and cooling to remove waste heat. ProbeDMA, AccuFilm, NanoBlitz and CSM are all compatible with the sample heating option.

NanoBlitz 3D

NanoBlitz 3D utilizes the InForce 50 or InForce 1000 actuator and a Berkovich tip to generate 3D maps of nanomechanical properties for high-E (> 3GPa) materials. NanoBlitz performs up to 100,000 indents (300x300 array) at < 1s per indent, and provides Young’s modulus (E), hardness (H), and stiffness (S) values at a specified load for each indent in the array. The large number of tests enables increased statistical accuracy. Histogram charts show multiple phases or materials. The NanoBlitz 3D package includes visualization and data handling capabilities.

NanoBlitz 4D

NanoBlitz 4D utilizes the InForce 50 or InForce 1000 actuator and a Berkovich tip to generate 4D maps of nanomechanical properties for both low-E/H and high-E (>3GPa) materials. NanoBlitz performs up to 10,000 indents (30x30 array) at 5-10s per indent, and provides Young’s modulus (E), hardness (H), and stiffness (S) values as a function of depth for each indent in the array. NanoBlitz 4D utilizes a constant strain rate method. The package includes visualization and data handling capabilities.

AccuFilm™ Thin Film Method Pack

The AccuFilm Thin Film Method Pack is an InView test method based on the Hay-Crawford model for measuring substrate-independent material properties using Continuous Stiffness Measurement (CSM). AccuFilm corrects for substrate influence on film measurements for hard films on soft substrates, as well as for soft films on hard substrates.

ProbeDMA™ Polymer Method Pack

The Polymer Pack provides the ability to measure the complex modulus of polymers as a function of frequency. The pack includes a flat-punch tip, a viscoelastic reference material, and a test method for evaluation of viscoelastic properties. This measurement technique is key to characterizing nanoscale polymers and polymer films that are not well-served by traditional dynamic mechanical analysis (DMA) test instruments.

Biomaterials Method Pack

The Biomaterials Method Pack provides the ability to measure the complex modulus of biomaterials with shear moduli on the order of 1kPa, and utilizes Continuous Stiffness Measurement (CSM). The pack includes a flat-punch tip and a test method for evaluation of viscoelastic properties. This measurement technique is key to characterizing small scale biomaterials that are not well-served by traditional rheometer instruments.

Scratch and Wear Testing Method Pack

Scratch testing involves the application of either a constant or ramped load to an indenter while moving across the sample surface at a specified velocity. Scratch testing allows characterization of numerous materials such as thin films, brittle ceramics and polymers.

DataBurst

DataBurst enables systems equipped with InView software and the InQuest controller to record displacement data at rates > 1kHz for measuring high strain step loads, pop-in and other high speed events. iMicro systems outfitted with the User Method Development option can also modify methods to work with DataBurst.

User Method Development for InView Control Software

InView is a powerful, intuitive experiment-scripting platform that can be used for designing novel or complex experiments. Experienced users can set up and perform virtually any small-scale mechanical test using the iMicro system equipped with the exclusive InView option.

Active Vibration Isolation with Modular Rack System

The optional high-performance active vibration isolation system provides additional vibration isolation for the iMicro nanoindenter, on top of its built-in vibration isolation. This easy-to-install system provides vibration reduction in all six degrees of freedom, with no tuning required. A Modular Rack System houses all components conveniently within an integrated rack.

True Test I-V Electrical Measurements

Controlled through the InView software, the True Test I-V option for the iMicro nanoindenter utilizes a precision ammeter and voltage source, a through-tip electrical path, and a conductive tip. This design allows the user to apply specific voltages to a sample and measure the current at the tip while simultaneously operating the InForce 50 or InForce 1000 actuator.

Linear Optical Encoders

The Linear Optical Encoder (LOE) option for the iMicro is integrated into the X and Y motion stages, and increases the positional accuracy and throughput of the testing process.

Indenter Tips and Calibration Samples

The InForce 50, InForce 1000 and Gemini actuators utilize interchangeable tips. A wide variety of sharp indenters are available, such as Berkovich, cube corner and Vickers, as well as flat punches, sphere punches, and other geometries. Standard reference materials and calibration standards are also available for the entire product line.

Hard Coatings

Typically, < 5µm thick hard coatings are applied to materials for surface protection, increased wear resistance, friction/lubrication, temperature resistance, and biocompatibility. The iMicro system can accurately perform ISO standardized nanoindentation testing and measure elastic modulus and hardness of the coating without influence from the substrate. The iMicro nanoindenter is also capable of measuring scratch hardness and wear resistance. In the case of high surface roughness coatings, the NanoBlitz 3D option can be used to quickly and quantitatively assess material properties.

Semiconductor Wafers

Semiconductor manufacturers often strive to produce thin films with high mechanical integrity. KLA nanoindenters are capable of measuring elastic modulus and hardness of the thinnest films, without artifacts from the underlying substrate. Correlating real material changes to process parameters is critical for semiconductor applications.

Ceramics and Glasses

Ceramics and glasses are important materials used in many applications for their unique optical, mechanical, and electrical properties. Traditional mechanical testing of ceramics and glasses (e.g., 4-point bending) can be time-consuming and expensive. The iMicro allows for rapid characterization of elastic modulus and hardness of small volumes of material. The scratch testing capability is also well-suited to quantitatively assess the scratch resistance of optical coatings.

Metals and Alloys

Metals and alloys play an important role in many industries, such as automotive, aerospace, medical, and semiconductor. Traditional mechanical testing of metals and alloys (e.g., tensile testing) can be time-consuming and expensive. The iMicro allows for rapid characterization of small volumes of material. It also allows users to characterize elastic modulus, hardness, and creep resistance, as well as gradients in these properties as a function of spatial location.

Batteries and Energy Storage

Mechanical properties of battery materials are closely tied to the battery’s stability, charge capacity, and lifetime. The iMicro nanoindenter is well-suited for testing a wide range of battery materials, from soft lithium to hard ceramic substrates. The iMicro provides advanced measurement solutions in many environments, including dry rooms and glove boxes.

Research and Development

KLA nanoindenters are not only built for the precision and accuracy required by demanding R&D applications, but are also flexible scientific instruments. Whether measuring the mechanical properties of novel materials, examining the deformation mechanisms of metals, or analyzing strain-rate sensitivity as a function of temperature, the iMicro provides a wide range of nanoindentation measurement capability to enable advanced research and accelerate development.

Pharmaceutical, Food and Personal Care

The mechanical properties of pharmaceuticals, food, and personal care products are strongly linked to customer satisfaction and experience. The elastic modulus or stiffness of a material can be related to texture and feel. The mechanical properties of coatings are also critical to on-time drug delivery. The iMicro nanoindenter provides quantitative information that supplements qualitative customer feedback.

Automotive and Aerospace

KLA nanoindenters allow advanced characterization of materials as a function of temperature, a key capability for automotive and aerospace applications. Strength, stiffness, and time-dependent mechanical properties are all measurable using iMicro’s nanoindentation techniques.

Nanoscale Universal Testing

The iMicro nanoindenter systems are capable of measuring nanoscale mechanical deformation and other nanomechanical properties. Measurement of nanoindentation, compression, tension, creep, stress relaxation, and fatigue are examples of the iMicro’s versatile capabilities. Standard and custom experimental methods are supported. The dedicated scientists in the nanoindenter group at KLA are also available for consulting and experiment design.

iMicro

iMicro

Product Description

Features

Applications

Industries

Hardness and Modulus Measurements (Oliver-Pharr)

High Speed Material Property Maps

ISO 14577 Hardness Testing

Polymer Tan Delta, Storage and Loss Modulus

Quantitative Scratch and Wear Testing

High Temperature Nanoindentation Testing

Continuous Stiffness Measurement (CSM)

InForce 50 Actuator

Gemini Two-axis Actuator

300°C Sample Heating

NanoBlitz 3D

NanoBlitz 4D

AccuFilm™ Thin Film Method Pack

ProbeDMA™ Polymer Method Pack

Biomaterials Method Pack

Scratch and Wear Testing Method Pack

DataBurst

User Method Development for InView Control Software

Active Vibration Isolation with Modular Rack System

True Test I-V Electrical Measurements

Linear Optical Encoders

Indenter Tips and Calibration Samples

Hard Coatings

Semiconductor Wafers

Ceramics and Glasses

Metals and Alloys

Batteries and Energy Storage

Research and Development

Pharmaceutical, Food and Personal Care

Automotive and Aerospace

Nanoscale Universal Testing

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Nano Indenter ® G200

Stylus and Optical Profilers

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Nano Indenter ^® G200