Tencor™ P-170

Tencor™ P-170

The Tencor P-170 is a cassette-to-cassette profiler offering step height measurement capability for steps from a few nanometers to one millimeter, for production environments. The system supports 2D and 3D measurements of step heights, roughness, bow, and stress for scans up to 200mm without stitching. The Tencor P-170 has advanced pattern recognition algorithms, enhanced optics, and an advanced stage for robust performance and seamless recipe transportability between systems – a key requirement for a 24x7 production environment.

Ready to get started?

Contact Us

Are you sure?

You've selected to view this site translated by Google Translate.
KLA China has the same content with improved translations.

Would you like to visit KLA China instead?



If you are a current KLA Employee, please apply through the KLA Intranet on My Access.