uNano^™

The uNano^™ is a micromechanical workstation specifically designed for undergraduate laboratories. Based on KLA’s industry-grade mechanical testers, the uNano performs experiments in demanding environments. Designed using a patented Depth Sensing Actuator (DSA), the uNano is a safe and robust testing platform for any microscopic mechanical test. The built-in XYZ motion system allows remote sample positioning, and an integrated microscope allows specimen visualization and test-site selection. Additional modular options expand the range of testing modes from the standard force/displacement to oscillatory, fatigue, tribology, surface mapping, high temperature, and more.

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Product Description

The uNano features the InForce 1000 Depth Sensing Actuator (DSA) for universal micromechanical tests. The optional InForce 50 DSA can be used to test softer or thinner materials. An extensive range of materials including metals, ceramics, composites, thin films, coatings, polymers, biomaterials and gels can be tested. The uNano can also measure the mechanical strength of structures such as micro beams, bridges, double-dog bone coupons, etc. The tool includes InView software, a flexible, modern software package that makes nanoscale testing easy. The high-speed InQuest controller and oriented carbon fiber gantry with integrated vibration isolation make the uNano a compact and stable platform.

Features

InForce 1000 DSA for capacitance displacement measurement and electromagnetic force actuation with interchangeable tips and platens
Optional InForce 50 DSA, providing maximum 50mN normal force for measuring soft materials, thin films, and small structures
InQuest high-speed controller electronics, enabling up to 100kHz D/A rate and 20us time constant
XYZ motion system with easy mounting magnetic sample holder
High stiffness oriented carbon-fiber gantry with integrated vibration isolation
Integrated microscope with digital zoom for precise targeting and imaging
InView software package with RunTest, ReviewData, InFocus reporting, InView University online training, and InView mobile application
Workbook and sample kit for microstructure & strength of 1018 Steel, Al-Cu, and TiN films

Applications

Microhardness (Vickers) testing
Depth sensing indentation hardness and modulus (Oliver-Pharr)
ISO 14577 hardness testing
Polymer tan delta, storage & loss modulus
Scratch and wear testing
Strength of materials
Statistical analysis of material properties
Correlation of mechanical properties to material structure and processes
Strain rate effects
High temperature mechanical testing
Surface property mapping

Microhardness Testing

Microhardness testing is commonly used for evaluating the hardness of materials. The uNano can be equipped with a Vickers indenter tip to perform traditional microhardness tests, including target selection, indentation, and indent area measurement.

Depth Sensing Indentation (Oliver-Pharr)

Mechanical characterization is critical in the process and manufacture of films, including the quality of coatings in the automotive industry, as well as during process control of front-end and back-end semiconductor manufacturing.

The uNano micromechanical tester is capable of measuring hardness and modulus for a wide variety of materials, from ultra-soft gels to hard coatings. The high-speed assessment of these properties enables quality control and assurance on production lines.

ISO 14577 Hardness Testing

The uNano system includes a pre-written ISO 14577 Test Method that measures material hardness in compliance with the ISO 14577 standard. This test method automatically measures and reports Young’s modulus, instrumented hardness, Vickers hardness and the normalized work-of-indentation.

Polymer Tan Delta, Storage and Loss Modulus

The uNano materials measurement system is capable of measuring both tan delta and the storage and loss modulus for ultra-soft materials, including viscoelastic polymers. Storage and loss modulus and tan delta are important properties of viscoelastic polymers, whose energy is stored as elastic energy and dissipated as heat. Both of these metrics measure energy dissipation in a given material. Contact us to request this feature as an option for your uNano.

Quantitative Scratch and Wear Testing

The uNano system can perform scratch and wear testing on a variety of materials. Coatings and films are subjected to many processes that test the strength of these films and their adhesion to the substrate, such as chemical-mechanical polishing (CMP) and wire bonding. It is important for these materials to resist plastic deformation during these processes, and to remain intact without blistering up from the substrate. Ideally, a dielectric material will have a high hardness and elastic modulus because these parameters help define how the material will react when subjected to manufacturing processes. Contact us to request this feature as an option for your uNano.

Strength of Materials

The uNano micromechanical tester can be used to experimentally confirm beam bending models for cantilevers and bridges. Using MEMS techniques to fabricate samples with a variety of geometries, students can correlate analytical models to real-world test results safely and inexpensively. Contact us to request this feature as an option for your uNano.

Statistical Analysis

Using the uNano system’s ability to perform high-speed experiments, students can run a large number of mechanical tests to generate statistical data, including histograms, standard deviation, student T-tests and other statistical metrics.

Correlation of Mechanical Properties to Material Structure and Processes

The default workbook and sample kit for the uNano includes an Al-Cu alloy with predefined fabrication, annealing, and polishing processes. The uNano can be used to measure hardness across the two Al-Cu phases to relate these properties to surface structure and processing characteristics.

High Temperature Mechanical Testing

Mechanical testing at elevated temperatures is critical to characterizing material performance under thermal stress, especially for quantifying failure mechanisms during thermomechanical processing. Varying the sample temperature during mechanical testing enables not only the measurement of thermal-induced behavioral changes, but also quantification of transition plasticity of materials. The optional heated stage on the uNano enables mechanical testing, up to 300°C.

High Speed Material Property Maps

For many materials, including composites, the mechanical properties may vary widely from one area to the next. The uNano micromechanical tester provides a sample stage movement of 100mm in the X and Y axes, and 25mm in the Z axis, allowing testing of a wide range of sample heights over a large sample area. The optional NanoBlitz Topography and Tomography software can quickly generate color maps of any of the measured mechanical properties. Contact us to request this feature as an option on your uNano system.

The options for the uNano^™ are available to add on with your new product, or in the future. Contact your sales rep to learn more.

Continuous Stiffness Measurement (CSM)

Continuous stiffness measurement is used to quantify dynamic material properties, such as strain rate and frequency-induced effects. The CSM technique involves oscillating the probe during indentation to measure properties as a function of depth, force, time, or frequency. The option comes with a constant strain rate experiment that measures hardness and modulus as a function of depth or load, which is the most common test method used across academia and industry. CSM is also used for other advanced measurement options, including the ProbeDMA™ method for storage and loss modulus measurements and AccuFilm™ substrate-independent measurements. The CSM is integrated into the InQuest controller and InView software to deliver ease of use and data quality.

InForce 50 Depth Sensing Actuator

The InForce 50 DSA performs nanomechanical tests with forces up to 50mN. The patented electromagnetic force application ensures robust measurements and long-term force and displacement stability. Industry-leading mechanical design ensures that harmonic motion is constrained to one degree of freedom so that force and displacement are controlled along a single axis. The InForce 50 DSA is compatible with the CSM, NanoBlitz, ProbeDMA, biomaterials, sample heating, scratch, wear and ISO 14577 testing options. Tips are interchangeable among the entire line of InForce DSAs.

300°C Sample Heating

The 300°C sample heating option allows the sample to be placed into a chamber for uniform heating while simultaneously undergoing tests with either the InForce 1000 or InForce 50 DSA. The option includes high-precision temperature control, inert gas backfill to reduce oxidation, and cooling to remove waste heat. ProbeDMA, AccuFilm, NanoBlitz and CSM are all compatible with the sample heating option.

NanoBlitz 3D

NanoBlitz 3D utilizes the InForce 50 or InForce 1000 DSA and a Berkovich tip to generate 3D maps of nanomechanical properties for high-E (> 3GPa) materials. NanoBlitz performs up to 100,000 indents (300×300 array) at < 1s per indent, and provides Young’s modulus (E), hardness (H), and stiffness (S) values at a specified load for each indent in the array. The large number of tests enables increased statistical accuracy. Histogram charts show multiple phases or materials. The NanoBlitz 3D package includes visualization and data handling capabilities.

NanoBlitz 4D

NanoBlitz 4D utilizes the InForce 50 or InForce 1000 DSA and a Berkovich tip to generate 4D maps of nanomechanical properties for both low-E/H and high-E (>3GPa) materials. NanoBlitz performs up to 10,000 indents (30×30 array) at 5-10s per indent, and provides Young’s modulus (E), hardness (H), and stiffness (S) values as a function of depth for each indent in the array. NanoBlitz 4D utilizes a constant strain rate method. The package includes visualization and data handling capabilities.

AccuFilm™ Thin Film Method Pack

The AccuFilm Thin Film Method Pack is an InView test method based on the Hay-Crawford model for measuring substrate-independent material properties using Continuous Stiffness Measurement (CSM). AccuFilm corrects for substrate influence on film measurements for hard films on soft substrates, as well as for soft films on hard substrates.

ProbeDMA™ Polymer Method Pack

The Polymer Pack provides the ability to measure the complex modulus of polymers as a function of frequency. The pack includes a flat-punch tip, a viscoelastic reference material, and a test method for evaluation of viscoelastic properties. This measurement technique is key to characterizing nanoscale polymers and polymer films that are not well-served by traditional dynamic mechanical analysis (DMA) test instruments.

Biomaterials Method Pack

The Biomaterials Method Pack provides the ability to measure the complex modulus of biomaterials with shear moduli on the order of 1kPa and utilizes Continuous Stiffness Measurement (CSM). The pack includes a flat-punch tip and a test method for evaluation of viscoelastic properties. This measurement technique is key to characterizing small scale biomaterials that are not well-served by traditional rheometer instruments.

Scratch and Wear Testing Method Pack

Scratch testing involves the application of either a constant or ramped load to the uNano system’s tip while moving across the sample surface at a specified velocity. Scratch testing allows characterization of numerous materials such as thin films, brittle ceramics and polymers.

DataBurst

DataBurst enables systems equipped with InView software and the InQuest controller to record displacement data at rates > 1kHz for measuring high strain step loads, pop-in and other high-speed events. uNano material measurement systems outfitted with the User Method Development option can also modify methods to work with DataBurst.

User Method Development for InView Control Software

InView is a powerful, intuitive experiment-scripting platform that can be used for designing novel or complex experiments. Experienced users can set up and perform virtually any small-scale mechanical test using the uNano system equipped with the exclusive InView option.

Active Vibration Isolation with Modular Rack System

The optional high-performance active vibration isolation system provides additional vibration isolation for the uNano material property measurement system, on top of its built-in vibration isolation. This easy-to-install system provides vibration reduction in all six degrees of freedom, with no tuning required. A Modular Rack System houses all components conveniently within an integrated rack.

True Test I-V Electrical Measurements

Controlled through the InView software, the True Test I-V option for the uNano micromechanical system utilizes a precision ammeter and voltage source, a through-tip electrical path, and a conductive tip. This design allows the user to apply specific voltages to a sample and measure the current at the tip while simultaneously operating the InForce 50 or InForce 1000 DSA.

Linear Optical Encoders

The Linear Optical Encoder (LOE) option for the uNano is integrated into the X and Y motion stages and increases the positional accuracy and throughput of the testing process.

Indenter Tips and Calibration Samples

The InForce 50 and InForce 1000 DSAs utilize interchangeable tips and platens. A wide variety of sharp indenters are available, such as Berkovich, Vickers, and cube corners, as well as platens such as flat punches and spherical punches. Tips and platens are also available in a variety of materials (diamond, sapphire, stainless steel, etc.) with varying geometries. Standard reference materials and calibration standards are also available for the entire product line.

Instrumented Indentation Testing with the KLA Nano Indenter^® Systems

Instrumented Indentation Testing (IIT) or Depth-Sensing Indentation (DSI) has become the technique of choice for nanomechanical testing and material characterization. This paper discusses the Oliver-Pharr test method, theory and analysis for extraction of Young's modulus, hardness, complex modulus, stress exponent for creep, and fracture toughness.

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uNano™

uNano™

Product Description

Features

Applications

Microhardness Testing

Depth Sensing Indentation (Oliver-Pharr)

ISO 14577 Hardness Testing

Polymer Tan Delta, Storage and Loss Modulus

Quantitative Scratch and Wear Testing

Strength of Materials

Statistical Analysis

Correlation of Mechanical Properties to Material Structure and Processes

High Temperature Mechanical Testing

High Speed Material Property Maps

Continuous Stiffness Measurement (CSM)

InForce 50 Depth Sensing Actuator

300°C Sample Heating

NanoBlitz 3D

NanoBlitz 4D

AccuFilm™ Thin Film Method Pack

ProbeDMA™ Polymer Method Pack

Biomaterials Method Pack

Scratch and Wear Testing Method Pack

DataBurst

User Method Development for InView Control Software

Active Vibration Isolation with Modular Rack System

True Test I-V Electrical Measurements

Linear Optical Encoders

Indenter Tips and Calibration Samples

Instrumented Indentation Testing with the KLA Nano Indenter® Systems

Strain Rate Sensitivity of Thin Metal Films by Instrumented Indentation

Continuous Stiffness Measurement (CSM)

Scratch Testing of Low k Dielectric Films and a Correlation Study of the Results

A Critical Assessment of the Effect of Nanoindentation Spacing on the Measurement of Hardness and Modulus Using Instrumented Indentation Testing

Critical Assessment of High Speed Nanoindentation Mapping Technique and Data Deconvolution on Thermal Barrier Coatings

Microscopic Measurement of the Stress-Strain Relation for Commercially Pure Titanium

Depth-Dependent Hardness of Irradiated Steel

High Speed Nanoindentation Mapping on Thermal Barrier Coatings

Mechanical Evaluation of Titanium Nitride Coated Tool Steel

Optical Coating Characterization at Elevated Temperatures

Tracking Temperature-induced Nano-structural Changes of Concrete by High-temperature Nanoindentation

Fracture Toughness in Bulk Materials

Nanoindentation Study of Property Changes in Irradiated Nuclear Materials

Measuring Viscoelastic Properties of Silicone Gel Coatings on MEMS-based Sensors

ISO 14577 Standardized Nanoindentation

Measuring the Mechanical Properties of Bone by Instrumented Indentation

How Much Indentation Testing is Enough?

Measuring Storage and Loss Modulus of Artificial Tissue

iNano®

Nano Indenter® G200X

Thin-Film Measurement Systems

Instruments

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uNano^™

uNano^™

Instrumented Indentation Testing with the KLA Nano Indenter^® Systems

iNano^®

Nano Indenter^® G200X