Semiconductor metrology is a critical discipline in the production of high performance, reliable metrology tools and devices. Whether verifying that a design will be manufacturable, characterizing a new process, or monitoring high-volume manufacturing processes, our comprehensive set of optical metrology solutions and tools, as well as analysis and process window optimization solutions, gives IC manufacturers the ability to maintain tight control of their processes.

Overlay Metrology Solutions and Tools

Optical CD Metrology Solutions and Tools

  • SpectraShape: Optical critical-dimension (CD) and shape metrology solutions

Film Thickness / Index Metrology Solutions and Tools

  • SpectraFilm Family: Film thickness, refractive index (RI) and stress metrology tools for leading-edge applications
  • Aleris Family: Film thickness, refractive index (RI), stress and composition metrology solutions for leading-edge applications
  • Surfscan SPx: Integrated SURFmonitor metrology module provides full-wafer maps that correlate to film properties, for blanket films

Wafer Metrology, Geometry and Topography Solutions

  • WaferSight PWG: Wafer thickness, shape and flatness metrology solutions
  • Surfscan SPx: Integrated SURFmonitor metrology module indicates sub-Angstrom surface topography variation on blanket films and bare substrates

Implant and Anneal Metrology Solutions

Surface Profiling Solutions

  • HRP-x50: Automated, stylus-based wafer surface profilers for topographic surface metrology


  • RS-x00: Sheet resistance mapping solutions

Reticle Pattern Placement Metrology Solutions and Tools

  • IPRO Series: Reticle pattern placement metrology solutions

All Surface Inspection and Metrology Tools

  • CIRCL Inspection, metrology and review cluster solutions for all wafer surfaces

Data Management Tools

  • 5D Analyzer: Advanced data analysis solution supporting a wide range of metrology systems
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