The increasing demand for MEMS (micro-electromechanical systems) technology is coming from diverse industries such as automotive manufacturing, space and consumer electronics. MEMS manufacturing promises to revolutionize nearly every product category by bringing together silicon-based microelectronics with micromachining technology, making possible the realization of complete systems-on-a-chip. KLA-Tencor offers the MEMS manufacturing tools and techniques, first developed for the integrated circuit industry, for this emerging MEMS manufacturing market.
Substrate Surface Metrology for MEMS Manufacturing
MEMs Manufacturing Wafer Inspection
- ICOS WI-2xx0: Optical inspection and metrology of MEMS manufacturing devices on a variety of wafer substrate
- ICOS WI-22xx Series: Automated optical inspection and metrology of MEMS manufacturing devices on a variety of wafer substrates, surface inspection, and 2D bump inspection
- ICOS WI-2280: Next-generation inspection capabilities and flexibility for LED applications.
MEMs Manufacturing Optical Profiling