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The increasing demand for MEMS (micro-electromechanical systems) technology is coming from diverse industries such as automotive manufacturing, space and consumer electronics. MEMS manufacturing promises to revolutionize nearly every product category by bringing together silicon-based microelectronics with micromachining technology, making possible the realization of complete systems-on-a-chip. KLA-Tencor offers the MEMS manufacturing tools and techniques, first developed for the integrated circuit industry, for this emerging MEMS manufacturing market.

Stylus Profiling

  • HRP-260: Automated high resolution stylus profiler for measurement of step height, CMP, roughness, and stress
  • P-17: Manual load stylus profiler for measurement of step height, roughness, and stress

Wafer Inspection

  • ICOS WI-2xx0: Optical inspection and metrology of MEMS manufacturing devices on a variety of wafer substrate
  • ICOS WI-22xx Series: Automated optical inspection and metrology of MEMS manufacturing devices on a variety of wafer substrates, surface inspection, and 2D bump inspection
  • ICOS WI-2280: Next-generation inspection capabilities and flexibility for LED applications

Optical Profiling

  • MicroXAM - 800: Manual load optical profiler for high aspect ratio step height measurements