Release Etch for MEMS

Jun 14, 2021

Talking Poster (with captions) – Introduction to vapor release etching using either vapor HF to etch sacrificial silicon oxide, or XeF2 to etch sacrificial silicon. Both are selective processes which allow MEMS release with long undercuts through narrow channels, without the corrosion and stiction often associated with wet etching. (3mins:40secs)

Are you sure?

You've selected to view this site translated by Google Translate.
KLA China has the same content with improved translations.

Would you like to visit KLA China instead?


您已选择查看由Google翻译翻译的此网站。
KLA中国的内容与英文网站相同并改进了翻译。

你想访问KLA中国吗?

If you are a current KLA Employee, please apply through the KLA Intranet on My Access.

Exit