Loading Events

Recipe Development on the New F54-XY-200

The F54-XY-200 is a brand-new series of spectroscopic thin-film mapping systems that leverage high stage repeatability (+/- 1um), industry leading Filmetrics measurement technology, and easy-to-use pattern recognition capability. With spot size as small as 1um and spectrometer configurations covering wide wavelength range (190nm – 1700nm) these systems can be set up to measure almost all dielectric films, semiconductor films, photoresist, and even complex film stacks. This webinar will cover recipe setup for thickness and optical property mapping on blank wafers. We’ll also demonstrate how to set up pattern recognition recipes on common CMP test wafers.

Register here

Back to Events

Are you sure?

You've selected to view this site translated by Google Translate.
KLA China has the same content with improved translations.

Would you like to visit KLA China instead?


您已选择查看由Google翻译翻译的此网站。
KLA中国的内容与英文网站相同并改进了翻译。

你想访问KLA中国吗?

If you are a current KLA Employee, please apply through the KLA Intranet on My Access.

Exit