KLA-Tencor is pleased to be a sponsor of the Electron, Ion, and Photon Beam Technology and Nanofabrication Conference. The EIPBN Conference is recognized as the foremost international meeting dedicated to lithographic science and technology and its application to micro and nanofabrication techniques. KLA-Tencor authors will report on their work Friday, June 1, in the Charged Particle Optics session, in a paper titled "High Brightness Metal Coated Silicon Field Emission Electron Sources."