KLA-Tencor is looking forward to meeting you at CS ManTech 2018. Please visit our booth to learn the features and benefits of KLA-Tencor metrology and inspection systems that address the needs of the compound semiconductor market. Dr. Fumimasa Horikiri from SCIOCS Company Ltd. will present "An Analysis of the Surface Morphology of the GaN-on-GaN Epi Wafers and the Control by the Substrate Off Angle." For over 30 years, CS ManTech has been the forum for technology and business professionals in the compound semiconductor industry to discuss technological challenges, exchange ideas, and network. It is the place where you will learn the latest advances in compound semiconductor manufacturing technology.