Automated step height metrology for production process monitoring

Making automated measurements in a production fab requires more than just the capability to measure the feature of interest. The system must have precise measurement results to be able to control the process 24x7. The system must have good matching so that any system used will produce the same measurement results. The system must have seamless recipe transportability so that the recipe can be created on a single system or offline software and transferred to any system and operate as good as on the original recipe. Finally, the ability to seamless connect with factory host control for remote tool operation and connecting with factory statistical process control (SPC) systems.

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Event Dates Tuesday September 22, 2020
11:00 AM PDT

WiPDA Asia

KLA is returning as a sponsor of The Workshop on Wide Bandgap Power Devices and Applications in Asia (WiPDA Asia).

The Workshop on Wide Bandgap Power Devices and Applications in Asia (WiPDA Asia) sponsored by IEEE Power Electronics Society (PELS), provides a forum for device scientists, circuit designers, and application engineers to share technology updates, research findings, development experience, and application knowledge.

Event Dates Monday, September 23 to
Wednesday, September 25, 2020
Location Icho-kaikan, Osaka University, Osaka, Japan

Semicon Taiwan

KLA is once again a sponsor of SEMICON Taiwan. In addition to the sponsorship, KLA’s Edwin Chew will present “Enabling Digital Age through Advanced Defect Characterization”, Thursday, September 24, 10:00am – 11:00am, Luxury Ballroom, Grande Luxe Banquet, 3F, Building A, CTBC Financial Park.

SEMICON Taiwan is the premier event in Taiwan for microelectronics manufacturing. Connect with the companies, people, products and information shaping the future of design and manufacturing for semiconductors, nanoelectronics, MEMS, photovoltaics and related advanced electronics.

Event Dates Wednesday, September 23 to
Friday, September 25, 2020
Location Taipei Nangang Exhibition Center (TaipeiEx), Taipei, Taiwan

SEMICON Europa

KLA is pleased to be an exhibitor and a sponsor at SEMICON Europa 2020. We invite you to visit our SensArray team at our booth C1218 to discuss in situ process management and our Filmetrics team at our booth C1148 to learn about our thin-film measurement systems.

SPTS Technologies, a KLA Company, invites you to visit their booth C1619 to learn about their wafer processing technologies and solutions.

SEMICON Europa is the annual premier event for the global electronics industry in Europe. The event covers new products and technologies for electronics design and manufacturing, and features technologies from across the electronics supply chain, from electronic design automation to device fabrication (wafer processing) to final manufacturing (assembly, packaging, and test).

Event Dates Tuesday, November 10 to
Friday, November 13, 2020
Booth C1148, C1218, C1619
Location Messe München GmbH, Munich, Germany

CS International Conference 2020

KLA is proud to announce its platinum sponsorship of
CS International Conference 2020
. In addition to our sponsorship, KLA’s Varun Gupta will present "Improving Yield for 5G Market Through Defect Inspection and Metrology".

CS International Conference 2020 is the must-attend industry event for the compound semiconductor industry. The conference will provide an overview of the status of the compound semiconductor industry and the evolution of compound semiconductor devices. CS International 2020 will provide timely, comprehensive coverage of every important sector within the compound semiconductor industry.

Event Dates Tuesday, November 17 to
Wednesday, November 18, 2020
Location Sheraton Brussels Airport Hotel, Brussels, Belgium

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