WaferSight 2+
wafer geometry &

  • Front and backside nanotopography
  • Localized defect detection and height metrology
  • Planarity for litho and CMP applications
  Aleris 8510
film thickness & composition

  • Improved 150nm spectroscopic ellipsometer technology
  • Enhanced film metrology for high-k metal gate layers
  • Superior stability and tool matching performance

  Therma-Probe 680   
implant/anneal stability & uniformity

  • Supports full range of implant and anneal applications
  • Improved short- and long-term dose detectability
  • High-resolution micro-uniformity map
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