The core of our plasma data collection and analysis system for plasma applications begins with PlasmaView. PlasmaView is the plasma etch process analysis viewing system that puts the user inside the process zone for detailed plasma etch process analysis. The plasma etch process analysis system uplinks its plasma data measurements from PlasmaTemp, PlasmaVolt and Plasma Etch Integral SensorWafers and displays the plasma data analysis versus time and space (2D or 3D). Movie views provide a feel for the critical transient responses and are useful for fault investigation.


Plasma etch processes are notoriously difficult to control. The sheer complexity of plasma etch systems and the number of plasma etch process variables makes plasma etch a proverbial fab ‘hot spot’. Our PlasmaControl Enhanced Analysis Engine provides a new level of plasma etch process control that will help monitor and control day-to-day operations and chamber-to-chamber matching. PlasmaControl distills the complicated plasma etch process down to a few critical control analysis and compares these plasma data analysis to user specifications for control. The user sees a ‘Go’ or ‘No-Go’ for each run with the ability to view trends, detect and investigate excursions and compare chambers. PlasmaControl is a key component in the PlasmaSuite plasma etch process data collection and plasma data analysis solution set for plasma etch applications.


PlasmaRx plasma data collection and analysis system gets inside the black box of plasma etch processes to help engineers identify the most likely cause of chamber problems. Despite advances in production techniques, plasma etch process and equipment engineers still rely on their experience and trial and error methods to diagnose the chamber issues – a timely, costly and often frustrating experience. With PlasmaRx plasma data collection and analysis system, plasma etch process engineers can utilize their PlasmaTemp SensorWafers to effectively diagnose the root cause of the digression within minutes, all without opening the chamber or the need for other offline metrology. The PlasmaRx plasma data analysis system, a key component of the PlasmaSuite plasma collection and data analysis system, gets you back in control quickly.

Plasma Suite plasma data analysis
At-a-glance screen displays reduce time needed to digest complex etch processes, providing quick Pass/Fail info.

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