Advanced Resistivity Metrology


Product Description

The RS-100 resistivity measurement system is a production worthy tool used in nearly all fabs worldwide. This resistivity measurement system provides capabilities such as advanced automation and improved edge performance to meet today's production requirements for 300mm wafers.

  • Accurate and repeatable resistivity measurements to 1mm from the conductive film edge gives enhanced performance for both 200mm and 200mm wafers
  • Patented temperature compensation provides the accuracy, long-term repeatability, and system-to-system/fab-to-fab matching for today's production requirements
  • Powerful, easy to use Windows NT-based software enables true multi-tasking capabilities


Metal deposition, CMP, ion implantation and diffusion

Enhanced Edge Performance Leading the industry, the RS-100 is the first resistivity measurement system with enhanced edge performance, collecting resistivity information up to 1 mm from the conductive film edge. Not only does this additional information provide greater insight to process control variance, it extends a wafer's useable area, lowering cost-of-ownership. The RS-100 resistivity measurement system's innovative approach to wafer alignment also improves the probe placement accuracy and repeatability over existing systems.

Powerful, Easy-to-Use Software Operating on Windows NT

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Related Information
RS-100 Product Overview