Researchers at advanced IC manufacturers, stepper companies, track companies, and material providers use virtual lithography modeling and simulation software and lithography optimization tools to explore critical-feature designs, manufacturability and process-limited yield of proposed lithographic technologies without the time and expense of printing hundreds of test wafers using experimental materials and prototype process equipment.

Lithography Modeling and Simulation Software

  • PROLITH: Lithography simulation tool designed for R&D scientists and engineers

Lithography Optimization Tools

  • ProDATA: Process window analysis tool