Product Description

The i3 Integral SensorWafer is a thin (1.15mm), accurate (±0.5°C) instrumented wafer designed to provide critical wet wafer processing temperature data for emerging technology nodes. As specifications for wet cleans become increasingly tighter, the i3 Integral enables you to get the most out of your high temperature, multi-chemical media wafer processing systems.

Uses of the Integral SensorWafer include:

  • Reducing tool start up and qualification time
  • Ensuring temperature uniformity of chemicals at the wafer surface
  • Validating etch rates based on good temperature data
  • Process development troubleshooting


Use the i3 Integral SensorWafer to establish a baseline temperature on a golden tool and perform chamber matching verification.

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