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UPGRADE CATALOG


upgrade

 

Welcome to KLA-Tencor's Service Upgrade Center where you can browse and download information on various available upgrades, options and features that KLA-Tencor offers on our legacy tools.


 

KLA-Tencor's Service upgrades are one of the ways KLA-Tencor can help our customers reach the full productivity and performance on their legacy tools. These upgrades long with our service expertise to install them offer improved performance, new capability or added function to your legacy tool.



Upgrade Catalog

Tool Tool Model Title    
ADE WaferCheck, UltraGage and UltraScan ASC2K Upgrade
   
Description
This upgrade increases the productivity of the tool and user, extends the life of the tool and offers additional capability (Autoloader Fine Teach, Connection to Infotools)
  • Tool Productivity

All All USB External Back-up Option for tools on NT OS
   
Description
This upgrades adds USB capability, provides additional storage capability, improves time to recovery of the tool after hard drive crash through full image back-up of the hard-drive
  • Tool Productivity
  • Customer Productivity

Amray 18xx, 19xx and 3xxx Productivity Enhancement Upgrades; PC,
WINXP OS, S/W, new optional capability
   
Description
This upgrade increases the productivity of the tool and user, expends the life of the tool, updates the operating system to Windows XP
  • Value Category
  • Tool Productivity
  • Customer Productivity
  • Software

BF 2135, 2138XP, 2139 and XPMMED Productivity Enhancement and Capability Upgrade; WIN NT OS and Software version 5.4
   
Description
This upgrade increases the productivity of the tool and user, updates the operating system to Windows NT, and offers additional optional capability (defective pixel information, allow 2 Digit Mask plus factory automation capability)
  • Tool Productivity
  • Customer Productivity
  • Software

CD-SEM 8100E & 8100XP Centering and Blanking Aperture Upgrade
   
Description
This upgrade improves measurement accuracy and repeatability through improved spot size and depth of focus
  • New Capability / Feature

CD-SEM 8100E, 8100ER, 8100ET, 8100XP, 8100XPT, 81ooXPR Productivity Enhancement Upgrades; upgrade from MAC to WINXP OS
   
Description
This is a major productivity enhancement that upgrades the tool from the MAC to WINXP operating system, it extends the life of the tool due to obsolete parts, is includes faster PC, new video card and new features and capabilities.
  • Tool Recovery
  • Customer Productivity
  • Software

CD-SEM 8250, 8450, ECD1, ECD2, ECD2 T Productivity Enhancement Upgrades; upgrade from NT to WINXP OS
   
Description
This is a productivity enhancement that upgrades the tool from the NT to WINXP operating system, it extends the life of the tool due to obsolete parts, it includes faster PC, new video card and new features and capabilities.
  • Tool Productivity
  • Customer Productivity
  • Software

CD-SEM 8100E, 8100R, 8100S, 8100T Advanced Central Recipe and Data Management Server
   
Description
This is a server offers a centralized data source, data protection and an alternative data backup.
  • Customer Productivity

Film ASET-F5, ASET-F5x, SpectraFx 100
and SpectraFx 200
Thermal Curtain Upgrade
   
Description
Thermal Curtain upgrade improves tool availability (uptime) after a down-event by maintaining the tool internal temperature, therefore, less time is needed to stabilize the tool after it is opened.
  • Tool Recovery

Film ASET-F5, ASET-F5x, SpectraFx 100 and SpectraFx 200 Productivity Enhancement Upgrades
   
Description
This upgrade increases the productivity of the tool and user, improves cycle time, expends the life of the tool, updates the pattern recognition system
  • Tool Productivity
  • Customer Productivity
  • Software

Optical Metrology Archer XT and Archer AIM Productivity Enhancement and Capability Upgrade; PC, WINXP OS, S/W
   
Description
This upgrade increases the productivity of the tool and user, expends the life of the tool, updates the operating system to Windows XP, and offers additional optional capability (Automation, Image enhancement, MPX support, and much more)
  • Tool Productivity
  • Customer Productivity
  • Software

Optical Metrology Archer 5, Archer 10, Archer 10XT, Archer XT PLUS, Archer AIM, Archer eAIMPLUS, Archer 100, Archer 200 Z Stage Sensor
   
Description
Z Stage Safety Sensor upgrade provides an improved sensor that decreases the likelihood of a hard-down event due to a Z stage sensor trip. This type of down-event may require a fix that will keep the tool down for 2-3 weeks. The new sensor will only require a soft-boot of the system.
  • Tool Recovery

Profiler P10, P11, P1 2 & P15 Productivity Enhancement Upgrades; PC, WINXP OS, S/W, new optional capability
   
Description
This upgrade increases the productivity of the tool and user, expends the life of the tool, updates the operating system to Windows XP, and offers additional optional capability (sequencing, 2D stress, 3D scan, 200mm Long Scan)
  • Tool Productivity
  • Customer Productivity

UV Film UV1xxx Productivity Enhancement Upgrades; PC, Software version 2.62.06, pattern recognition systems and new capability
   
Description
This upgrade increases the productivity (cycle time) of the tool and user, expends the life of the tool, updates the pattern recognition system and upgrades to software version 2.62.06
  • Tool Productivity
  • Customer Productivity
  • Software

Comprehensive Upgrade List

Tool Tool Model Title  
All Majority of K-T Legacy Tools Factory Automation, GEM/SECS, Semi Standards - E4, E5, E30, E37, Advanced Semi Standard - E87, E39, E40, E90, E94, Overhead Track - E84 & hardware, Barcode & RFID readers, Light tower
 
Description
  • New Capability / Feature
  • Customer Productivity

All Majority of K-T Legacy Tools NT USB External Backup Option (NUEBO)
 
Description
  • Customer Productivity

ADE WaferCheck, UltraGage, & UltraScan ASC2K Controller (PC)
 
Description
  • Tool Productivity
  • Customer Productivity
  • Tool Recovery

ADE UltraScan 8300 EMI Res Gauge
 
Description
  • New Capability / Feature

ADE WaferCheck, UltraGage & UltraScan: 7200, 8300, 9300, 9500, 9600, 9800 ADE Non-Contact Type Gage
 
Description
  • New Capability / Feature

ADE CR8X Remote PC Interface (RCI)
 
Description
  • New Capability / Feature

ADE 9xxx 9xxx E+ to E++
 
Description
  • Tool Productivity

ADE 9xxx 9xxx E+ to E++ Software - New ASC2K Controller for SW version below 10.10L
 
Description
  • Tool Productivity
  • Customer Productivity

Amray Amray Enhanced PC, WinXP
 
Description
  • Tool Productivity
  • Customer Productivity

Brightfield 2351, 2360, 2365, 2366, 2367, 2371 Offline Simulator
 
Description
  • New Capability / Feature

Brightfield 2351, 2360, 2365, 2366, 2367, 2371, 9000 NFS option
 
Description
  • New Capability / Feature

Brightfield 21xx Software version 5.4.010
 
Description
  • New Capability / Feature

Brightfield 21xx Software version 5.4.010
 
Description
  • New Capability / Feature

Brightfield 2135, 2138, 2138XP DOS to NT, ADC
 
Description
  • New Capability / Feature

CDSEM 8100XP Low Particle Count Pre-Aligner
 
Description
  • New Capability / Feature

CDSEM 8100XP Remote Analysis Station, 10 Base T
 
Description
  • New Capability / Feature

CDSEM 8100XP NT Recipe and Data Server, 10 Base T
 
Description
  • New Capability / Feature

CDSEM 8250, 8450 Windows Remote Workstation and Productivity s/w pack
 
Description
  • New Capability / Feature

CDSEM 8250, 8450 Advanced Central Recipe and Data Server
 
Description
  • New Capability / Feature

CDSEM 8xxx Silicon Strip Aperture
 
Description
  • New Capability / Feature

CDSEM 8100XP, 8300 Quick Pump Retrofit
 
Description
  • New Capability / Feature

CDSEM 8100XP CBA Retrofit Kit
 
Description
  • New Capability / Feature

CDSEM 8100XP SMC Retrofit Kit
 
Description
  • New Capability / Feature

CDSEM 8100XP SMC Retrofit Kit
 
Description
  • New Capability / Feature

CDSEM 8100XP ACE Retrofit Kit
 
Description
  • New Capability / Feature

CDSEM 8100x Mac to WinXP & NT to WinXP
 
Description
  • Tool Productivity
  • Customer Productivity

Darkfield AIT 2,3 Software version 5.3.20.7
 
Description
  • New Capability / Feature

Darkfield AIT XUV Software version V6.3.89, AIT XUV Win2K
 
Description
  • New Capability / Feature

Darkfield AIT UV Software version V6.3.89, AIT UV Win2K
 
Description
  • New Capability / Feature

Darkfield AIT UV++ Software version v6.3.89, AIT UV++ Win2K
 
Description
  • New Capability / Feature

Darkfield AIT XUV Software version V6.3.89, AIT XUV WinNT
 
Description
  • New Capability / Feature

Darkfield AIT UV Software version V6.3.89, \AIT UV WinNT
 
Description
  • New Capability / Feature

Darkfield AIT UV Software version V6.3.89, AIT UV WinNT
 
Description
  • New Capability / Feature

Darkfield AIT XP+ Software version V6.3.89, AIT XP+, WinNT
 
Description
  • New Capability / Feature

Darkfield AIT UV+ Software version V6.3.89, AIT UV+ WinNT
 
Description
  • New Capability / Feature

Darkfield AIT2, AIT3, AIT XP, AITXP+ RTC Package
 
Description
  • New Capability / Feature

Darkfield AIT UV Upgrade to Spot 2.2,3.5,6um
 
Description
  • New Capability / Feature

Darkfield AIT2 AIT2 TO FUSION,200mm chuck upgrade
 
Description
  • New Capability / Feature

EBEAM eCD1, eCD1T Remote Workstation
 
Description
  • New Capability / Feature

EBEAM eCD1, eCD1T Advanced Central Recipe and Data Management Package (server)
 
Description
  • New Capability / Feature

EBEAM eCD2, eCD2T Remote workstation
 
Description
  • New Capability / Feature

EBEAM eCD2, eCD2T Central recipe & data server
 
Description
  • New Capability / Feature

Film RS35, RS55, RS75, RS100 Software; Strattrax & WINXP
 
Description
  • New Capability / Feature

Film UV-1xxx Software version 2.6.2
 
Description
  • New Capability / Feature

Film UV-1xxx Enhanced PC (850 MHz , Matrox & Cognex Cards, WIN-NT)
 
Description
  • Tool Productivity
  • Customer Productivity

Film UV1250, UV1280SE, UV1050, UV1080 Horizontal Lamp Upgrade
 
Description
  • Improved lamp longevity and uptime

Film ASET-F5x 2D Stress
 
Description
  • New Capability / Feature

Film ASET-F5X, SpectraFx-100/200 Software version, Summit v.4.9
 
Description
  • New Capability / Feature

Film ASET-F5 & ASET-F5x Enhanced PC
 
Description
  • Tool Productivity
  • Customer Productivity

Film ASET-F5, ASET-F5x, SpectraFX Thermal Curtain
 
Description
  • Tool Recovery

Film Aset-F5x ASET-F5x DVD kit
 
Description
  • New Capability / Feature

MIE INS3000, INS3300 XP Controller (PC)
 
Description
  • Tool Productivity
  • Customer Productivity
  • Tool Recoverye

Optical CD SCD100/200, F5X-SCD Software version Summit v 4.9
 
Description
  • New Capability / Feature

Optical Metrology 5100, 5105, 5107, 5200 KLASS4 Stepper Analysis Software (for non-XP systems)
 
Description
  • New Capability / Feature

Optical Metrology 5100, 5105, 5107, 5200 KLASS PSF ANALYSIS (VMS) Shift Focus (PSF) Analysis for non-XP
 
Description
  • New Capability / Feature

Optical Metrology 5100, 5105, 5107, 5200, 5200XP, 5107XP, 5100XP, 5105XP KLASS Phase Shift Focus (PSF) Analysis Windows Stand Alone
 
Description
  • New Capability / Feature

Optical Metrology 5100, 5105, 5107, 5200 KLASS Analysis Combo (KLASS4 + PSF) for non-XP
 
Description
  • New Capability / Feature

Optical Metrology 5200XP, 5107XP, 5100XP, 5105XP KLASS Phase Shift Focus (PSF) Analysis for XP System Kit
 
Description
  • New Capability / Feature

Optical Metrology 5200XP, 5107XP, 5100XP, 5105XP KLASS ANALYSIS COMBO -XP KLASS4.0+PSF
 
Description
  • New Capability / Feature

Optical Metrology All XP SOFTWARE LICENSES
 
Description
  • New Capability / Feature

Optical Metrology 5100, 5105, 5107, 5200, 5200XP, 5107XP, 5100XP, 5105XP Stand Alone KLASS 4.0 for Windows
 
Description
  • New Capability / Feature

Optical Metrology 5107 2DCD Measurement Software for Non-XP
 
Description
  • New Capability / Feature

Optical Metrology 5107, 5107XP Apex (Take-Off) Angle Measurement
 
Description
  • New Capability / Feature

Optical Metrology 5100, 5105, 5107, 5200, 5200XP, 5107XP, 5100XP, 5105XP Non-Contact Height Measurement
 
Description
  • New Capability / Feature

Optical Metrology 5100, 5105, 5107, 5200, 5200XP, 5107XP, 5100XP, 5105XP CPM Overlay Measurement Software
 
Description
  • New Capability / Feature

Optical Metrology 5100, 5105, 5107, 5200, 5200XP, 5107XP, 5100XP, 5105XP SMP/CD Measurement Option for Overlay FOV
 
Description
  • New Capability / Feature

Optical Metrology 5107 Advanced CD Measurement Package
 
Description
  • New Capability / Feature

Optical Metrology 5107, 5107XP Advanced Overlay Measurement Package
 
Description
  • New Capability / Feature

Optical Metrology 5107 Multi-CD Measurement
 
Description
  • New Capability / Feature

Optical Metrology 5107, 5107XP Slanted Line Measurement
 
Description
  • New Capability / Feature

Optical Metrology 5200XP, 5107XP, 5100XP, 5105XP RDM Machine Client Software and License
 
Description
  • New Capability / Feature

Optical Metrology 5200XP, 5107XP, 5100XP, 5105XP RDM Remote PC Client Software and License
 
Description
  • New Capability / Feature

Optical Metrology 5200XP, 5107XP, 5100XP, 5105XP KLASS4 Stepper Analysis Software for XP
 
Description
  • New Capability / Feature

Optical Metrology 5200XP, 5107XP, 5100XP, 5105XP RS1 Remote Client
 
Description
  • New Capability / Feature

Optical Metrology 5107XP 2DCD Measurement Software for XP
 
Description
  • New Capability / Feature

Optical Metrology 5107, 5107XP Multi-Edge CD Measurement
 
Description
  • New Capability / Feature

Optical Metrology Archer 10XT, Archer 10, Archer AIM, Archer 5 RS1 Remote Client Software
 
Description
  • New Capability / Feature

Optical Metrology Archer 10XT, Archer 10, Archer AIM, Archer 5v CMP Measurement (CPM+ANRA)
 
Description
  • New Capability / Feature

Optical Metrology Archer 10XT, Archer 10, Archer AIM, Archer 5 CPM Overlay Measurement SW
 
Description
  • New Capability / Feature

Optical Metrology Archer 10XT, Archer 10, Archer AIM, Archer 5 ANRA Overlay Measurement SW
 
Description
  • New Capability / Feature

Optical Metrology Archer 10XT, Archer 10, Archer AIM, Archer 5 BFCD - Bright Field CD
 
Description
  • New Capability / Feature

Optical Metrology Archer 10XT, Archer 10, Archer AIM, Archer 5 SMP-Stepper Measurement Process
 
Description
  • New Capability / Feature

Optical Metrology Archer 10XT, Archer 10, Archer AIM, Archer 5 Multi layer & XY separation
 
Description
  • New Capability / Feature

Optical Metrology Archer All RDM server upgrade (includes Dell 2900 server and RDM 6.3 and one tool client)
 
Description
  • New Capability / Feature

Optical Metrology Archer All RDM additional tool client upgrade from 3.3 to 6.3
 
Description
  • New Capability / Feature

Optical Metrology 5xxx All RDM SW to v3.3.2 (Tool Client)
 
Description
  • New Capability / Feature

Optical Metrology 5xxx All RDM SW to v3.3.2 (Tool Client)
 
Description
  • New Capability / Feature

Optical Metrology ArcherXT Software version 5.5
 
Description
  • New Capability / Feature

Optical Metrology ArcherAIM Software version 5.5
 
Description
  • New Capability / Feature

Optical Metrology Archer 5/10 Software version 3.1
 
Description
  • New Capability / Feature

Optical Metrology 53xx Software version 15.32
 
Description
  • New Capability / Feature

Optical Metrology 51xx/ 52xx Software version 14.7
 
Description
  • New Capability / Feature

Optical Metrology 5100, 5105, 5107, 5200, 5200XP, 5107XP, 5100XP, 5105XP Reflective Chuck Kit, 200mm
 
Description
  • New Capability / Feature

Optical Metrology 5100, 5105, 5107, 5200 Ethernet Network Connection Hardware (for 10baseT, BNC, and AUI connectors)
 
Description
  • New Capability / Feature

Optical Metrology UV1050 Upgrade to UV1080 (Optical only)
 
Description
  • Enhance Performance

Optical Metrology Archer 200 Reflect Host Chuck RDM
 
Description
  • New Capability / Feature

Optical Metrology Archer 10XT, Archer AIM WIN XP + PC Enhancement (SW 3.3 to SW5.5)
 
Description
  • Tool Productivity
  • Customer Productivity

Optical Metrology Archer 10XT, Archer AIM WIN XP + PC Enhancement (SW 3.3 to SW5.5)
 
Description
  • Tool Productivity
  • Customer Productivity

Optical Metrology Archer 10, 5, AIM, 10XT, XT PLUS, Archer 100, 200, eAIMPLUS Z Stage Safety Sensor KIT Schneeberger Stage
 
Description
  • New Capability / Feature

Profiler P10, P11, P12, P15 without Pat Rec Profiler WIN XP + PC Enhancement
 
Description
  • Tool Productivity
  • Customer Productivity

Profiler P10, P11, P12, P15 Profiler WIN XP + PC Enhancement Options, LONG SCAN 200 MM, 2D stress w/ locator, 3D Scan, Sequencing, Offline Simulator 7.0
 
Description
  • Tool Productivity
  • Customer Productivity

Profiler Profiler offline software V6.41 Profiler WIN XP + PC Enhancement Options, LONG SCAN 200 MM, 2D stress w/ locator, 3D Scan, Sequencing, Offline Simulator 7.0
 
Description
  • Feature and Capability

Profiler HRP75, HRP100 Pattern Recognition
 
Description
  • Tool Productivity
  • New Capability / Feature

Profiler HRP75, HRP100 Off-line software v4.X
 
Description
  • Feature and Capability

Profiler HRP220, HRP320 Off-line software v5.X
 
Description
  • Feature and Capability

RAPID RAPID 3xx, SL3xx Reticle Transfer Station with 5in and 6in frame adapters
 
Description
  • New Capability / Feature

RAPID RAPID 3xx, SL3xx Remote System Reset
 
Description
  • New Capability / Feature

RAPID RAPID 3xx, SL3xx 200MHz SPARC20 (Upgrade from 75MHz SPARC20)
 
Description
  • New Capability / Feature

RAPID RAPID 3xx, 4xx Mask Adaptor, Perkin-Elmer, 7.25 round
 
Description
  • New Capability / Feature

Surfscan SFS 6XXX Software 4.2 with or without CPU
 
Description
  • New Capability / Feature

Surfscan SFS 6XXX NFS Chameleon Network,V.4.x
 
Description
  • New Capability / Feature

Surfscan SFS 6220 MS Network interface, WIN98 V. 4.2
 
Description
  • New Capability / Feature

Surfscan SP1 NT USB External Backup Option (NUEBO) on front panel & XP USB External Backup Option (NUEBO) on front panel
 
Description
  • Customer Productivity

Surfscan SP1 TBI, DLS SP1 MX4.1 option RSF Mask Mini-D-Open
 
Description
  • New Capability / Feature

Surfscan SP1 TBI, DLS SP1 MX4.2 options, Haze Package, SP1 MX4.2 Option E116, Recipe Checker, Desktop software, Enhanced Edge Exclusion Option, Haze Normalization & Haze Analysis, BF sizing
 
Description
  • New Capability / Feature

ThermaWave OP2xxx, OP3xxx Software version 3.3B28
 
Description
  • New Capability / Feature

ThermaWave OP5000 or older Software version V4.3.1.2, IRACE
 
Description
  • New Capability / Feature

ThermaWave OP5000 or older GO software version V1.2
 
Description
  • New Capability / Feature
  • Tool Productivity

ThermaWave OP52xx NT to XP PC upgrade
 
Description
  • Tool Productivity
  • Customer Productivity

 

If you would like more information on an upgrade or if you do not see an upgrade, option or feature listed here that may be of interest to you please contact your local service center or e-mail us at a.david.smith@kla-tencor.com