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KLA-Tencor’s wafer defect review systems capture high resolution images of the defects detected by inspection tools. The images provided by our defect review systems enable defect classification, helping chipmakers to identify, review, and resolve yield issues. KLA-Tencor’s suite of SEM wafer defect inspectors, defect review and classification tools and data management systems form a complete defect review solution for finding, identifying and tracking yield-critical defects and process issues.