Reticle Inspection Systems



For 3xx and SL3xx owners ready to move to higher capability levels or to increase throughput, we offer a robust portfolio of system upgrades for your installed systems. Through these upgrades, we can work with you to quickly and cost-effectively enhance the capabilities of your tools.

  • Increase throughput with Channel Upgrades
  • Enhance contamination sensitivity with STARlight Upgrade
  • Enable OPC and phase-shift inspection with Algorithm Upgrades
  • Inspect smaller line width reticles with HR Upgrades
  • Increase capabilities and capacity without investing in additional systems
  • Reduce service costs with 24/7 iSupport

KLA-Tencor offers a full portfolio of field-proven, high quality upgrades that can enhance capabilities to meet increased production requirements and inspect and measure next-generation
devices-without incurring major capital costs. We can install these upgrades in your fab anywhere in the world, to provide you with upgraded, reliable performance and enable you to maximize the return on investment in your KLA-Tencor tools..

For complete information, download the overview below.

Disclaimer: Important information about used products

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