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Data Servers

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Product Description

 

The KT-95i/97i image-capable data servers are part of the Total Data Management strategy from KLA-Tencor. The 9Xi servers support KLA-Tencor’s reticle inspection systems, including the TeraScan and TeraStar-Series as well as KLA-Tencor's legacy tools.

  • Central data hubs serve KLA-Tencor’s TeraScan, TeraStar and legacy reticle inspection equipment.
  • Supports the storage and retrieval of setup and results files, as well as many statistical analysis features.
  • Inspection results with or without defect images are readily available for transfer to other equipment for defect repair, printability study, reticle to wafer defect tracking, and statistical process control.
  • Inspection recipes or data can be shared among different generations of KLA-Tencor inspection products.
  • Inspection reports can quickly be moved to other users via remote login, backup and auto-print functions.

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