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Process Probe 1850

The Process Probe 1850 extends your ability to measure temperatures at a high precision for up to 350°C. With its high measurement accuracy, this is the best tool available for bake plate characterization at 230° to 350°C, in particular spin on dielectrics (SOD), polyimide processing, and anti-reflective coating processing. Instrumented with anywhere from one to 34 sensors, the Process Probe 1850 helps characterize and benchmark bake plates during SOD, helps investigate which insulators to use and which process conditions delivers the best results, and allows for the optimization of the next generation of inter-metal dielectric.

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Process Probe™ 1850