KLA-Tencor’s wafer manufacturing equipment and tools include wafer inspection (wafer surface inspection), wafer shape quality review, metrology and data management systems. Specialized wafer quality inspection tools assess wafer surface quality and detect, count and bin defects during the wafer manufacturing process and as a critical part of outgoing wafer quality inspection. Wafer geometry systems ensure the wafer shape is extremely flat and uniform in thickness, with precisely controlled wafer shape topography. Specifications for wafer defectivity, geometry and wafer shape quality are tightening as the dimensions of transistors become so small that the properties of the substrate can substantially affect transistor performance.
Wafer Surface and Defect Inspection Tools
Wafer Defect Review System
Wafer Geometry and Nanotopography Metrology
Data Management System