KLA-Tencor’s wafer manufacturing tools include wafer inspection, wafer shape quality review, metrology and data management systems. Specialized wafer inspection tools assess wafer surface quality and detect, count and bin defects during the wafer manufacturing process and as a critical part of outgoing wafer quality inspection. Wafer geometry systems ensure the wafer shape is extremely flat and uniform in thickness, with precisely controlled wafer shape topography. Specifications for wafer defectivity, geometry and wafer shape quality are tightening as the dimensions of transistors become so small that the properties of the substrate can substantially affect transistor performance.

Wafer Surface and Defect Inspection Tools

• Surfscan SPx: Wafer defect and surface quality inspection tools and systems for inspection of polished wafers, epi wafers and engineered substrates
• SURFmonitor: Defect/metrology module system for inspection and monitoring wafer process drift and capture low-contrast defects, for use with Surfscan SPx Series wafer quality inspection tools

Wafer Defect Review System

• eDR-7000 Series: SEM-based wafer defect review and classification system

Wafer Geometry and Nanotopography Metrology

• WaferSight: Wafer thickness, wafer shape and wafer flatness metrology systems
• SURFmonitor: Module for Surfscan SPx Series wafer quality inspection tool indicating sub-Angstrom surface topography variation on bare substrates

Data Management System

• FabVision: Data management system for wafer inspection and manufacturing factories
• Klarity Defect: Data management and analysis modules for wafer manufacturing and quality inspection