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KLARITY LED
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Automated defect analysis for LED yield enhancement and rapid time to results

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Product Description

Based on the industry-leading KLARITY Defect product for integrated circuit manufacturing, the new KLARITY LED provides a high performance solution for LED device makers, including automated in-line scan analysis for the entire fabwide manufacturing process. With KLARITY LED, device makers have an advanced in-line alternative solution for automated defect analysis of LED production processes, and an option to more efficiently share performance and reliability data within their organization for faster yield learning, while replacing existing labor-intensive manual report generation methods. KLARITY LED delivers faster excursion detection and root-cause analysis than prevailing industry methods to enable effective decision making, thus helping reduce the impact of materials risk and improve yields.

Designed to help LED device makers accelerate yield learning cycles and prompt immediate corrective action, KLARITY LED includes:
  • Automated analysis (intelligent statistical process control excursion and baseline monitor)–supports faster time-to-corrective action with automated knowledge-based reports, extensive drill-down capability and practical decision flow analysis that previously required expert intervention and interpretation
  • Advanced Defect Source Analysis—automates the process of root cause analysis for defect sources providing flexible graphical analysis of common and adder defects
  • Proprietary Spatial Signature Analysis–identifies spatial signatures, tracks dynamic signature count and leverages stack wafer signatures to identify the root cause for faster detection and corrective action
  • Defect image review–provides wafer map point and click access, as well as an image gallery, allowing device makers to validate classification and defect transition commonality identification and rapidly generate automated reports
  • Repeater defect detection—identifies repeat defects across an individual wafer, as well as from wafer to wafer

KLARITY LED complements KLA-Tencor's wafer inspection systems to provide an enhanced LED-specific portfolio solution for high return on critical LED inspection investments

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