Product Description

The INS3000 DUV automated optical defect review and defect classification system incorporates the advantages of a conventional optical microscope into a fully automated, production-ready tool. With wavelengths spanning visible, UV and DUV ranges, the INS3000 DUV enables the highest resolution available on an optical microscope: down to 80nm.
 

• Ultimate optical resolution and throughput up to 2200 defects per hour
• User-friendly operation with review interfaces for all major defect inspection systems
• Optional UV, DUV and DIC module, retrofitable to existing INS systems
• Optional automatic defect classification (ADC), image capture and archive modules
• Automatic defect review capability for efficient image capture and offline review
• Optional specialized automated defect inspection with SpotCheck