Product Description

The Aleris 8350 is a high performance films metrology tool, enabling customers to meet tighter process tolerances for thickness, refractive index, and stress measurements. The BBSE technology provides a significant improvement in precision, matching and stability. The 8350 covers the broadest range of 45nm applications including diffusion, CVD, etch and others.

• Delivers up to 2x better thickness, precision and 4x better RI matching than its predecessor due to enhanced optical sensitivity and stability
• Enables measurement for tighter tolerances and smaller scribelines with its 20% smaller box size
• Improved repeatability, matching, and high throughput allows production monitoring of both global and 2D stress measurements on product wafers

Application

Broadest range of applications including diffusion, CVD, Etch, and others. Control for critical applications: gate oxide, NO, 193 ARCs, multi-layer stacks, back end of line (BEOL) stress in low k and ultra low k dielectrics.

Comprehensive Films Metrology Control

The Aleris 8500 (advanced thickness, composition and stress metrology), Aleris 8350 (thickness, refractive index, and stress metrology), Aleris 8310 (thick simple films metrology), Quantox XP (in-line real-time electrical monitoring and characterization), and Rs-200 (resistivity metrology), provide comprehensive films metrology control using optical and electrical topography measurements.