AlphaStep® D-100 Stylus Profiler
The KLA-Tencor Development Series of Stylus profilers offer a complete solution focusing on the needs of the engineering and research community. Our Development Series of surface profiler products is designed to match the varied requirements of our customers through the delivery of full featured products, integration of new technologies, and improved performance.
The AlphaStep® D-100 stylus profiler rapidly and quantitatively measures the 2D topography of surfaces. The AlphaStep® D-100 stylus profiler includes an 800 micron (optional 1.2 millimeter) Z range, sub-angstrom resolution, 6 angstrom step height repeatability, manual x-y theta sample positioning stage, and many other features.
The graphical user interface has a multi-document interface that allows a user to continually acquire and display scan data. This permits the user to analyze the data while acquiring additional measurements. The stylus profiler software controls support scans to be automatically leveled, scan features measured, and displayed in an Excel compatible format on the screen. All of the windows are independent which mean the control panels and data display windows, real-time scanning window, the data results window can float or be docked anywhere on the screen. This feature gives the user a fully flexible environment in which to acquire and analyze data.