Product Description

The P-22 is a full-featured, fully automated profiler providing comprehensive surface topography analysis for a wide range of applications. A built-in vibration isolation system with KLA-Tencor's MicroHead II technology ensures highly repeatable step height measurements. The P-22 wafer handler capabilities, pattern recognition, automated data analysis, and GEM/SECS compliant software enables fully automated measurements without the need for operator intervention.

• Enables fast and highly repeatable step height measurements, including automatic cursor placement
• Provides up to 40 key surface parameters to analyze step height, roughness, waviness, slope, and radius of curvature
• Automates the wafer handling process for 100, 125, 150, 200 mm wafer sizes
• Utilizes the interactive MaxView 3D which includes measurement tools for performing data analysis on 3D scans, including the ability to analyze each 2D trace within the scan
• Exports data as ASCII for easy data analysis in other applications such as spreadsheets

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