Metrology

Substrate

P-16+
Compact, Advanced Surface Profiling

Product Description

The P-16+ stylus profiler is a surface metrology tool used in a wide range of applications and industries, from R&D departments and universities to production and process monitoring. Its precise force control provides excellent vertical resolution, precision, and reliability measurements. It delivers automated step height, surface contour, waviness and roughness measurements with detailed 2D or 3D analysis of topography for a variety of surfaces and materials.

Application

  • Semiconductor
    CMP monitoring and bump metrology
  • Material Science
    Thin film thickness, roughness and stress analysis
  • Data Storage
    Thin film head structure definition and disk edge roll-off
  • Optoelectronics
    Microlens and diffuser shape
  • MEMS
    Etch rates and trench depth analysis

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Related Information
P-16+ PRODUCT OVERVIEW