The MicroXAM represents a series of optical surface profilers that support a wide range of surface topography applications. Applications served are diverse, including measurement of step heights for complex MEMS structures, quantification of surface texture of biomedical devices, and control of laser texture bump profiles on hard drive disk media.

Optical interferometry offers a unique capability to capture 3D surface maps, yet also measuring film thickness of transparent materials. Complex algorithms have been optimized to handle these material dependencies to offer the most accurate measurements. Furthermore, the powerful yet simple to use MapVUE™ analysis software package offers the user an endless number of parameter calculations, filtering options, and imaging analysis to meet the most stringent R&D needs. The flexibility of the instrument is further demonstrated with its mix of optical objectives and sample stages available to meet the need of each application.

As process development begins to mature, the MicroXAM readily adapts to production environments where "hands free" process control is critical. The easy-to-use interface offers simple recipe development, automated sequencing, and simple yet powerful analysis tools.

The MicroXAM series of optical profilers offers the widest range of capability, supporting the broadest applications in surface measurement -- with quick measurement speeds at high precision and accuracy.

Applications

Fiber-optics connector end-face
Measure concentricity of the fiber, end-face radius of curvature, apex position and the angle of the polish, MT connectors, custom interconnects and ribbon termination.

Paper bank note
Measure ink relief and fibers, paper surface quality, coating thickness/finish, compression studies and defect analysis.

Silicon fiber-optic device substrate
Show the shape, size and detail features for fiber-optic device production include V-groove dimensioning, component alignment and chip positioning.

Arterial stent device
Measure surface texture of metal stent, and top surface of coating. The coating, minus the metal surface, equals film thickness. MicroXAM also characterizes the bevel of the stent wires.

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• MicroXAM Product Brochure