Product Description

Benefits

• High throughput at maximum sensitivity
• Broad dynamic range
• Superior defect discrimination and classification
• Exceptional tool-to-tool matching and correlation

The AWIS Systems are fully automatic scanning surface inspection tools that identify and classify particle and crystalline defects on silicon and epi wafers. Modular transports allow full factory automation (FA) and flexible sorting configurations.

Productivity Options

Modular AWIS platforms allow up to 2 load ports for sorting, factory automation with 300mm edge grip handling, and new backside surface inspection. The new EdgeCheck functions allow you to reject edge defects with no throughput reduction.

Superior Defect Discrimination

AWIS systems employ the most advanced optical scanning technology. Separation of signals by the Angular Resolved Scatter (ARS) architecture, combined with sophisticated visual data analysis software, results in a flexible system supporting analysis and characterization of multiple classes of surface defects including particles, COP's, large defects, scratches, EPI defects, and now edge defects. Using proprietary spiral raster scan technology, AWIS systems achieve this performance at high throughput levels without compromising defect detection.



 







A non-EG (edge grip) configuration is available as the AWIS FA model.

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