Alpha-Step IQ Surface Profiler
- Provides advanced and customizable 2D analysis capabilities.
- Enables easy location of measurement features via saved site image with recipe.
- Features excellent repeatability and reproducibility.
- Precisely determines and analyzes thin step heights, surface microroughness, and overall form error on thin film coatings.
- Provides sufficient vertical range for large topography variations.
- Includes multiple language support for users with a worldwide presence.
- Enables faster analysis routines by applying saved sets of analysis instructions.
Product Description
The Alpha-Step IQ stylus-based surface profiler combines high measurement precision with versatility and economy. Ideal for semiconductor pilot lines and materials research, this advanced profiler enables faster process learning and higher yields. With guaranteed 8Ã… (1 sigma) or 0.1% step height repeatability and sub-angstrom resolution, the Alpha-Step IQ provides excellent repeatability and performance to analyze and monitor processes.
Application
- Two-dimensional analysis for CMP monitoring, bump metrology, SIMS crater depth analysis, and metal etch uniformity
- Determines and analyzes thin step heights, surface microroughness, and overall form error on thin film coatings.
- Overall material step height and roughness measurements
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Related Information
Alpha-Step IQ Product Overview
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