Services & Support
|Our services and support enable you to achieve maximum results. We offer highly accurate products for data acquisition and analysis, and our knowledge and experience will ensure that you have the support necessary to get your job done.|
|Return Materials Authorization
To ensure accurate tracking of your material while it is at our facility we require that you obtain an RMA (returned material authorization) prior to returning material to us. An RMA can be obtained online by clicking here.
We unfortunately, cannot be responsible for material returned to us without an RMA.
Purchase orders can be faxed or mailed directly to our Milpitas headquarters. Whenever possible, a hard copy purchase order in an amount to cover repair cost should accompany the return. This will assist in expediting the turnaround.
It is our goal to accommodate your requirement for turnaround. If the product you are returning has caused a machine down situation, please inform us of this when you call to receive an RMA number.
SensArray warrants all repair work to be free from material or workmanship defects for 60 days from the time of the repair shipment. This limited warranty applies only to the areas of the wafer that were actually repaired by the company during this specific RMA. This limited warranty does not extend the normal warranty period for the wafer when purchased.
|As we work to provide you with the highest level of service and support, your comments and suggestions will help us to serve you more effectively and to continue to improve in everything that we do. Please share with us what you think about our products, services, and support.
Email us or contact Technical Support at: DL-Sensarray-Support@kla-tencor.com
- Base Station 300/300Z
- EtchTemp Plasma Etch Wafer Temperature Measurement Tool
- EtchTemp-SE (ET-SE)
- i3 Integral
- i3 Integral for Implant
- i3 Integral for Wet Applications
- Implant and Wet - Implant and Wet Wafer Processing
- Integrated Wafer Processes
- iWafer Carrier Station
- SensArray 1535 Temperature Monitoring Probe
- SensArray 1630
- SensArray 1730
- SensArray 1840
- SensArray 1850
- SensArray 2030
- SensArray 2050
- SensArray 2070
- SensArray HighTemp-350
- SensArray Process Probe 1530