| Upgrades-3xx and Starlight™ 3xx |
Reticle Inspection Systems
 Application For 3xx and SL3xx owners ready to move to higher capability levels or to increase throughput, we offer a robust portfolio of system upgrades for your installed systems. Through these upgrades, we can work with you to quickly and cost-effectively enhance the capabilities of your tools.
KLA-Tencor offers a full portfolio of field-proven, high quality upgrades that can enhance capabilities to meet increased production requirements and inspect and measure next-generation devices-without incurring major capital costs. We can install these upgrades in your fab anywhere in the world, to provide you with upgraded, reliable performance and enable you to maximize the return on investment in your KLA-Tencor tools.. For complete information, download the overview below. Disclaimer: Important information about used products |