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Product Description
The TeraFab SLQ-2X contains the latest and most advanced technology with the completely new STARlight-2+ algorithm and the smallest pixels for highest sensitivity, to address the broadest array of applications in leading edge fabs.
- Maximum sensitivity with the new 72nm pixel increases defect captures by 2x times the previous generation
- Single-die and scribe/frame capabilities
- Extendable from 65nm and 45nm production to 32nm development
Application
Incoming Quality Control and Mask Requalification for logic and memory fabs
Comprehensive Reticle Quality Control Solution
The family of three systems builds on the highly successful STARlight-2TM inspection technology and provides chipmakers with increased flexibility to develop cost-effective reticle quality
KLA Tencor | Reticle | TeraFab SLQ-2X
management strategies.
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