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Product Description
The TeraFab SLQ-1X offers the lowest cost of ownership (CoO) and the highest ease of use (EOU) of the TeraFab systems. The system includes many of the latest STARlight-2+algorithm advances, plus is extendible to smaller pixels if required.
- Replaces the "do nothing" and "print check" applications
- Early warning detections detect mask yield excursions before they print on the wafer
- Improved ease of use for the production environment
- Better sub-resolution assist feature (SRAF) discrimination enables pixel migration to bigger pixels without nuisance defects leading to better throughput and cost of ownership (CoO)
Application
Reticle Requalification for logic fabs
Comprehensive Reticle Quality Control Solution
The family of three systems builds on the highly successful STARlight-2TM inspection technology and provides chipmakers with increased flexibility to develop cost-effective reticle quality management strategies.
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