Product Description

The 95i/97i image capable data servers are part of the Total Data Management strategy from KLA-Tencor. The 9Xi servers not only support the latest KLA-Tencor reticle inspection systems, but also KLA-Tencor's legacy tools. There are serial ports for the 200 Series, die-to-die and die-to-database tools, and Ethernet ports for the 300, STARlight™, and URSA inspection systems.

• Central data hubs serve all KLA-Tencor reticle inspection equipment.
• System software supports the storage and retrieval of setup and results files, as well as many analysis features.
• Inspection results are readily available for local statistical analyses and transfer to other platforms for defect repair, printability study, reticle to wafer defect tracking, and statistical process control.
• Setup, plate, recipe, and defect data are readily accessible.
• Inspection reports can quickly be moved to other users via remote login, auto-backup and auto-print functions.

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• 95i/97i Data Servers Product Overview