Profilometer
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The KLA-Tencor series of benchtop stylus and optical profilometers offer the most complete range of stylus measurement features to meet the needs of the engineering and research communities. These research-grade surface profilometer products merge capability and value with the tool performance expected from KLA-Tencor’s metrology products.

Surface Profilometer Measurement 

Stylus Profilometer
Optical Profiling
 
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