SAN JOSE, Calif., May 17, 2001 - KLA-Tencor Corp. (Nasdaq: KLAC) today introduced Klarity ACE 5.5, the latest version of its Klarity ACE yield correlation and analysis software. Utilizing this software tool, customers can easily integrate, correlate and analyze yield- and process-related data obtained during all stages of integrated circuit (IC) development and production in one-third the time required with competing yield analysis tools. As a result, customers can accurately determine the source of defects and process excursions, and quickly correct them-speeding their ramp to higher device yields. Since its introduction 18 months ago, Klarity ACE has been adopted by leading integrated device manufacturers and foundries across 28 fabs, as well as by 28 fabless design companies and test houses.

As semiconductor manufacturing costs continue to rise, yield management has become increasingly vital in helping chipmakers to accelerate the ramp of new processes and technologies into production in order to remain competitive and meet their profit margins. Finding defects and process errors during production is an important step in maximizing yield. Of equal importance, however, is finding the source of these yield problems so that corrective action can be taken quickly to optimize the processes. This is especially true for foundries, which implement many processes and chip designs into production. By incorporating Klarity ACE in their fab network, chipmakers can identify the type and source of these defect and process errors, and prevent them from impacting their bottom line.

"Klarity ACE 5.5 allows us to review hundreds of parameters simultaneously in order to quickly identify and correct potential yield problems before they can impact our customers' products," stated John Docherty, senior vice president of manufacturing and technology operations at Chartered Semiconductor. "We are committed to KLA-Tencor's Klarity ACE software, and are adopting it in all of our fabs."

Klarity ACE integrates all yield- and process-related data from IC fabs, foundries, wafer and photomask manufacturers, and IC design houses into a centralized database, and provides low-yielding-lot, split-lot and wafer-yield-spatial analysis. These capabilities enable users to clearly identify the relationships between in-line data, such as gate critical dimensions (CDs), and test data, such as speed bin, to more rapidly identify and resolve specific process problems that impact device yield, performance and reliability. Klarity ACE is particularly beneficial to foundries and fabless semiconductor companies because it allows fabless, in-house design engineers to share data with fab engineers via the Internet-enabling quick resolution of yield problems at all stages of IC development and fabrication.

Klarity ACE 5.5-the latest version of KLA-Tencor's yield analysis software-incorporates several new features that dramatically improve ease of use and reduce analysis time by more than 30 percent. It can differentiate between random and systematic yield problems, providing users with the data they need in order to take appropriate corrective measures. Its new spatial and equipment sensitivity features facilitate analysis across multiple wafer lots and help users to more quickly identify the source of a yield problem. With Klarity ACE 5.5, users can also schedule yield analysis in advance so that data from specific wafer lots can be analyzed automatically without requiring the wafers to be manually taken offline.

"The start-up phase is the most critical period for a fab," stated Dr. Ellis Chang, general manager of KLA-Tencor's Yield Solutions Division and vice president of the company's Process Module Control Group. "Chipmakers need to ramp their advanced processes into production as quickly as possible, while maximizing their yields, in order to successfully compete in this market. Using Klarity ACE 5.5, market leaders like Chartered Semiconductor can quickly identify and correct process and defect problems at their source before they get out of control, helping them to transition through this challenging phase."

Klarity ACE 5.5 is currently available. Customers can contact their local sales representatives to find out how they can upgrade previous versions of Klarity ACE to Klarity ACE 5.5.


About KLA-Tencor: KLA-Tencor is the world leader in yield management and process control solutions for semiconductor manufacturing and related industries. Headquartered in San Jose, Calif., the company has sales and service offices around the world. An S&P 500 company, KLA-Tencor is traded on the Nasdaq National Market under the symbol KLAC.

Contact:
Meggan Powers
Director Corporate Communications